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"Testing of MEMS-based microsystems."

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Hans G. Kerkhoff (2005)

Dagstuhl

Trier

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DOI: 10.1109/ETS.2005.40

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Hans G. Kerkhoff:
Testing of MEMS-based microsystems. ETS 2005: 223-228

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