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"Self-aligned double patterning decomposition for overlay minimization and ..."

Hongbo Zhang et al. (2011)

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DOI: 10.1145/2024724.2024741

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Rasit Onur Topaloglu:
Self-aligned double patterning decomposition for overlay minimization and hot spot detection. DAC 2011: 71-76

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