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"Multilevel statistical process control of asynchronous multi-stream ..."

Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao (2010)

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DOI: 10.1109/COASE.2010.5584508

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao:
Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing. CASE 2010: 57-62

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