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"A New Capacitive MEMS Flow Sensor for Industrial Gas Transport Monitoring ..."
Abbas Panahi et al. (2020)
- Abbas Panahi, Pouya Ghasemi, Sebastian Magierowski, Ebrahim Ghafar-Zadeh:
A New Capacitive MEMS Flow Sensor for Industrial Gas Transport Monitoring Applications. CCECE 2020: 1-4
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