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"Automatic Identification of Yield Limiting Layout Patterns Using Root ..."

Wu-Tung Cheng et al. (2017)

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DOI: 10.1109/ATS.2017.49

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  dblp key:
  - conf/ats/ChengKBYSETRPFC17
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  persistent URL:
  - https://dblp.org/rec/conf/ats/ChengKBYSETRPFC17
Wu-Tung Cheng, Randy Klingenberg, Brady Benware, Wu Yang, Manish Sharma, Geir Eide, Yue Tian, Sudhakar M. Reddy, Yan Pan, Sherwin Fernandes, Atul Chittora:
Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data. ATS 2017: 219-224

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