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David Gross 0004

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affiliation: Robert Bosch GmbH, Schwieberdingen, Germany

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2014
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David Gross, Sabine Haag, Martin Schneider-Ramelow, Klaus-Dieter Lang:
The influence of liners with Ti, Ta or Ru finish on thin Cu films. Microelectron. Reliab. 54(9-10): 1877-1882 (2014)

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