EP 0902974 A1 19990324 - CONDUCTORS FOR INTEGRATED CIRCUITS
Title (en)
CONDUCTORS FOR INTEGRATED CIRCUITS
Title (de)
LEITER FÜR IC'S
Title (fr)
CONDUCTEURS POUR CIRCUITS INTEGRES
Publication
Application
Priority
- SE 9700954 W 19970530
- SE 9602191 A 19960531
Abstract (en)
[origin: WO9745873A1] The quality factor (Q-value) of spiral inductors or coils (305) in IC-circuits is improved by partially removing the semiconducting substrate (301) under the inductor (305) by etching trenches (303), which are refilled with an isolating material. Hence, the losses caused by the substrate (301) are reduced and the quality factor is increased accordingly. The parasitic capacitance to the substrate (301) is also reduced, increasing the resonance frequency of the inductor (305) and extending the useful frequency range of operation of the inductor. Furthermore, by utilizing the uppermost metals of a multi-layer metal structure in the circuit, additional reduction of losses and parasitic capacitance are also achieved. The use of trenches (303) under metal patterns for loss and capacitance reduction is not limited to spiral inductor layouts, and can be used for any metal line, bond pad, etc.
IPC 1-7
IPC 8 full level
H01L 21/822 (2006.01); H01L 21/02 (2006.01); H01L 23/522 (2006.01); H01L 23/64 (2006.01); H01L 27/04 (2006.01); H01L 29/49 (2006.01)
CPC (source: EP KR)
H01L 23/5227 (2013.01 - EP); H01L 23/645 (2013.01 - EP); H01L 28/10 (2013.01 - EP); H01L 29/49 (2013.01 - KR); H01L 2924/0002 (2013.01 - EP)
C-Set (source: EP)
Citation (search report)
See references of WO 9745873A1
Designated contracting state (EPC)
DE ES FI FR GB IT NL
DOCDB simple family (publication)
WO 9745873 A1 19971204; AU 3113097 A 19980105; CA 2256763 A1 19971204; CN 1220778 A 19990623; EP 0902974 A1 19990324; JP 2000511350 A 20000829; KR 100298480 B1 20010807; KR 20000010660 A 20000225; SE 510443 C2 19990525; SE 9602191 D0 19960531; SE 9602191 L 19971201
DOCDB simple family (application)
SE 9700954 W 19970530; AU 3113097 A 19970530; CA 2256763 A 19970530; CN 97195081 A 19970530; EP 97926345 A 19970530; JP 54224797 A 19970530; KR 19980708627 A 19981027; SE 9602191 A 19960531