Crossmark

A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation

Crossref DOI link: https://doi.org/10.1007/s11633-020-1225-4

Published Online: 2020-04-14

Published Print: 2020-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Armin, Maniza http://orcid.org/0000-0002-4332-1731
Roy, Priyo Nath

Das, Sajal Kumar
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Text and Data Mining valid from 2020-04-14

Version of Record valid from 2020-04-14
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Article History

Received: 23 June 2019

Accepted: 20 January 2020

First Online: 14 April 2020