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A Two Magnetron Sputter Deposition Chamber Equipped with an Additional Ion Gun for $in situ$ Observation of Thin Film Growth and Surface Modification by Synchrotron Radiation Scattering / Schell, Norbert ; Von Borany, Johannes ; Hauser, Jens
2007 - Published in : AIP Conf. Proc.: 879 (2007) , pp. 1813-1816 External link: Published version from AIP
In : 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1813-1816
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