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Nitrogen Doping and Thermal Stability in HfSiO(x)N(y) Studied by Photoemission and X-ray Absorption Spectroscopy / Toyoda, Satoshi ; Ando, Takashi ; Fukuda, Seiichi ; Lee, Dong Ick ; Okabayashi, Jun ; Oshima, Masaharu ; Pianetta, Piero A ; Sun, Shiyu ; Sun, Steven ; Takahashi, Haruhiko
SLAC-PUB-11564.
- 2005. - 11 p.
Fulltext from SLAC

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