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1.
Non-Contact, Image-Based Photoluminescence Metrology for Ion Implantation and Annealing Process Inspection / Buczkowski, Andrzej ; Li, Zhiqiang ; Walker, Tom ; Hummel, Steven G ; Borland, John O
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 566-569 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.566-569
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2.
High Dopant Activation And Low Damage P+ USJ Formation / Borland, John ; Shishiguchi, Seiichi ; Mineji, Akira ; Krull, Wade ; Jacobson, Dale ; Tanjyo, Masayasu ; Lerch, Wilfried ; Paul, Silke ; Gelpey, Jeff ; McCoy, Steve et al.
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 96-100 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.96-100
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