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65nm Device Characteristics Matching on Single and Batch System Ion Implanter / Okabe, Ken-ichi ; Miura, Ryuichi ; Kase, Masataka 2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 645-648 External link: Published version from AIP In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.645-648 詳細記錄 - 相似記錄

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