CERN Accelerating science

Article
Title	Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics
Author(s)	Rinella, G Aglieri (CERN) ; Andronic, A (Munster U., ITP) ; Antonelli, M (INFN, Trieste ; Trieste U.) ; Baccomi, R (INFN, Trieste ; Trieste U.) ; Ballabriga, R (CERN) ; Barbero, M (Marseille, CPPM) ; Barrillon, P (Marseille, CPPM) ; Baudot, J (Strasbourg, IPHC) ; Becht, P (Heidelberg U.) ; Benotto, F (INFN, Turin ; Turin U.) ; Beole, S (INFN, Turin ; Turin U.) ; Bertolone, G (Strasbourg, IPHC) ; Besson, A (Strasbourg, IPHC) ; Bialas, W (CERN) ; Borghello, G (CERN) ; Braach, J (CERN) ; Buckland, M (INFN, Trieste ; Trieste U.) ; Bugiel, S (Strasbourg, IPHC) ; Buschmann, E (CERN) ; Camerini, P (INFN, Trieste ; Trieste U.) ; Campbell, M (CERN) ; Carnesecchi, F (CERN) ; Cecconi, L (CERN) ; Charbon, E (Ecole Polytechnique, Lausanne) ; Chauhan, A (DESY) ; Colledani, C (Strasbourg, IPHC) ; Contin, G (INFN, Trieste ; Trieste U.) ; Dannheim, D (CERN) ; Dort, K (CERN) ; de Melo, J (CERN) ; Deng, W (CERN ; DESY) ; De Robertis, G (INFN, Bari ; Bari U.) ; Di Mauro, A (CERN) ; Martin, A Dorda (CERN ; KIT, Karlsruhe) ; Dorokhov, A (Strasbourg, IPHC) ; Dorosz, P (CERN) ; Eberwein, G (Oxford U.) ; Bitar, Z El (Strasbourg, IPHC) ; Fang, X (Strasbourg, IPHC) ; Fenigstein, A (Technion) ; Ferrero, C (INFN, Turin ; Turin U.) ; Fougeron, D (Marseille, CPPM) ; Gajanana, D (Nikhef, Amsterdam) ; Goffe, M (Strasbourg, IPHC) ; Gonella, L (Birmingham U.) ; Grelli, A (Nikhef, Amsterdam) ; Gromov, V (Nikhef, Amsterdam) ; Habib, A (Marseille, CPPM) ; Haim, A (Unlisted, IL) ; Hansen, K (DESY) ; Hasenbichler, J (CERN ; Vienna, Tech. U.) ; Hillemanns, H (CERN) ; Hong, G H (Yonsei U.) ; Hu, C (Strasbourg, IPHC) ; Isakov, A (Prague, Tech. U.) ; Jaaskelainen, K (Strasbourg, IPHC) ; Junique, A (CERN) ; Kotliarov, A (Prague, Tech. U.) ; Kremastiotis, I (CERN) ; Krizek, F (Prague, Tech. U.) ; Kluge, A (CERN) ; Kluit, R (Nikhef, Amsterdam) ; Kucharska, G (CERN) ; Kugathasan, T (CERN) ; Kwon, Y (Yonsei U.) ; La Rocca, P (INFN, Catania) ; Lautner, L (CERN ; Munich, Tech. U.) ; Leitao, P (CERN) ; Lim, B -H (INFN, Turin ; Turin U.) ; Loddo, F (INFN, Bari ; Bari U.) ; Mager, M (CERN) ; Marras, D (Cagliari U. ; INFN, Cagliari) ; Martinengo, P (CERN) ; Masciocchi, S (Heidelberg U.) ; Mathew, S (Rutherford) ; Menzel, M W (Heidelberg U.) ; Morel, F (Strasbourg, IPHC) ; Mulyanto, B (DESY) ; Munker, M (CERN) ; Musa, L (CERN) ; Nakamura, M (Furukawa Electric) ; Pangaud, P (Marseille, CPPM) ; Perciballi, S (INFN, Turin ; Turin U.) ; Pham, H (Strasbourg, IPHC) ; Piro, F (CERN ; Ecole Polytechnique, Lausanne) ; Prino, F (INFN, Turin ; Turin U.) ; Rachevski, S (INFN, Trieste ; Trieste U.) ; Rebane, K (CERN) ; Reckleben, C (DESY) ; Reidt, F (CERN) ; Ricci, R (INFN, Salerno ; Salerno U. ; Stefan Meyer Inst. Subatomare Phys.) ; Russo, R (Nikhef, Amsterdam) ; Sanna, I (CERN ; Munich, Tech. U.) ; Sarritzu, V (Cagliari U. ; INFN, Cagliari) ; Savino, U (INFN, Turin ; Turin U.) ; Schledewitz, D (Heidelberg U.) ; Sedgwick, I (Rutherford) ; Senyukov, S (Strasbourg, IPHC) ; Snoeys, W (CERN) ; Soltveit, H K (Heidelberg U.) ; Sonneveld, J (Nikhef, Amsterdam) ; Soudier, J (Strasbourg, IPHC) ; Stachel, J (Heidelberg U.) ; Suzuki, M (Furukawa Electric) ; Svihra, P (CERN) ; Suljic, M (CERN) ; Takahashi, N (Furukawa Electric) ; Termo, G (CERN) ; Tiltmann, N (Munster U., ITP) ; Toledano, E (Unlisted, IL) ; Triffiro, A (Catania U. ; INFN, Catania) ; Turcato, A (INFN, Turin ; Turin U.) ; Usai, G (Cagliari U. ; INFN, Cagliari) ; Valin, I (Strasbourg, IPHC) ; Villani, A (INFN, Trieste ; Trieste U.) ; Van Beelen, J B (CERN) ; Vassilev, M D (SLAC) ; Vernieri, C (SLAC) ; Vitkovskiy, A (Nikhef, Amsterdam) ; Wu, Y (USTC, Hefei) ; Yelkenci, A (Nikhef, Amsterdam) ; Yuncu, A (Heidelberg U.)
Publication	2023
Number of pages	15
In:	PoS Pixel2022 (2023) 083
In:	10th International Workshop on Semiconductor Pixel Detectors for Tracking and Imaging (PIXEL 2022), Santa Fe, USA, 11 - 16 Dec 2022, pp.083
DOI	10.22323/1.420.0083
Subject category	Detectors and Experimental Techniques
Project	CERN-EP-RDET
Abstract	The long term goal of the CERN Experimental Physics Department R&D; on monolithic sensorsis the development of sub-100nm CMOS sensors for high energy physics. The first technologyselected is the TPSCo 65nm CMOS imaging technology. A first submission MLR1 includedseveral small test chips with sensor and circuit prototypes and transistor test structures. One ofthe main questions to be addressed was how to optimize the sensor in the presence of significantin-pixel circuitry. In this paper this optimization is described as well as the experimental resultsfrom the MLR1 run confirming its effectiveness. A second submission investigating wafer-scalestitching has just been completed. This work has been carried out in strong synergy with the ITS3upgrade of the ALICE experiment.
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