| Article | |
| Title | Investigation of Converted $p^{+}$ poly-Si Gate Formed by $B_{18}H_{X}^{+}$ Cluster Ion Implantation |
| Author(s) | Hwang, Sun-Hwan ; Kim, D S ; Joo, Y H ; Oh, J G ; Lee, J K ; Jung, T W ; Cho, H J ; Sohn, Y S ; Sheen, D S ; Pyi, S H ; Kim, Steve ; Huh, T H ; Krull, W A ; Cho, H T |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.163-166 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.163-166 |
Journalen skapades 2007-03-14, och modifierades senast 2016-07-01
External link:
Published version from AIP
Published version from AIP