CERN Accelerating science

Article
Title	Study of LOR5B resist for the Fabrication of Hard X-ray Zone Plates by E-beam Lithography and ICP
Author(s)	Chen, Y T ; Lin, I K ; Lo, T N ; Su, C I ; Liu, C J ; Je, J H ; Margaritondo, G ; Hwu, Y
Publication	2007
In:	AIP Conf. Proc. 879 (2007) pp.1516-1519
In:	9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1516-1519