Nanoimprinting/ Nanoimprint Lithography

Nanoimpritinting can be the cheapest way to make nano-microstructures as small as 50nm.

Types of Nano imprinting
UV Nanoimprinting

  • Soft mold-based UV nanoimprinting

  • Imprinting is done on UV-curable polymer or resist

  • The soft mold-based process is suitable for volume production and prevents damage to the expensive master mold

  • Large size nanoimprinting ~500x500mm

  • High refractive index NIL resist

Substrate

Mold / Master

UV

UV

Release or Demolding

Nano pattern

Thermal Nanoimprinting

  • The polymer is heated above its glass transition temperature and then pressed against the mold to get the pattern imprinted on the polymer.

  • Typical substrates PMMA, PC, PET, etc.

Services available

  • Master mold fabrication: Si, Quartz, Ni, Polymer, etc.

  • Nanoimprinting

  • Dry etching

  • Ashing to remove the residual layer

  • Mold cleaning

Nanoimprinting for your application
Optics

  • Microlens array (MLA), Metasurfaces

  • DOE,

  • Waveguides for VR/AR

  • head-up displays (HUD)

  • Fiber Photonics

  • Gratings

  • Metalenses for compact cameras

  • Antireflection structures (Moth eye)

  • Machine Vision

BioMedical

  • Nano-pores for DNA sequencing

  • LSPR-based Biochips

  • Nanosieves

Security

Micro-nanostructures on banknotes, tickets, etc.