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Keywords = subwavelength grating double slot waveguide

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13 pages, 3555 KiB  
Article
Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator
by Kaiwei Lu, Beiju Huang, Xiaoqing Lv, Zan Zhang and Zhengtai Ma
Sensors 2024, 24(6), 1929; https://doi.org/10.3390/s24061929 - 17 Mar 2024
Cited by 2 | Viewed by 1401
Abstract
Silicon photonic-based refractive index sensors are of great value in the detection of gases, biological and chemical substances. Among them, microring resonators are the most promising due to their compact size and narrow Lorentzian-shaped spectrum. The electric field in a subwavelength grating waveguide [...] Read more.
Silicon photonic-based refractive index sensors are of great value in the detection of gases, biological and chemical substances. Among them, microring resonators are the most promising due to their compact size and narrow Lorentzian-shaped spectrum. The electric field in a subwavelength grating waveguide (SWG) is essentially confined in the low-refractive index dielectric, favoring enhanced analyte-photon interactions, which represents higher sensitivity. However, it is very challenging to further significantly improve the sensitivity of SWG ring resonator refractive index sensors. Here, a hybrid waveguide blocks double slot subwavelength grating microring resonator (HDSSWG-MRR) refractive index sensor operating in a water refractive index environment is proposed. By designing a new waveguide structure, a sensitivity of up to 1005 nm/RIU has been achieved, which is 182 nm/RIU higher than the currently highest sensitivity silicon photonic micro ring refractive index sensor. Meanwhile, utilizing a unique waveguide structure, a Q of 22,429 was achieved and a low limit of detection of 6.86 × 10−5 RIU was calculated. Full article
(This article belongs to the Section Optical Sensors)
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Figure 1

Figure 1
<p>(<b>a</b>) Schematic of a hybrid waveguide block double slot subwavelength grating (HDSSWG) waveguide resonator and design parameters of HDSSWG waveguide block. (<b>b</b>) The magnified waveguide cross section exposing in a sensing medium. The model is not in scale.</p> Full article ">Figure 2
<p>(<b>a</b>) The effective refractive index and group refractive index of DSSWG with four different parameters; (<b>b</b>–<b>d</b>): Electric field magnitude distribution in the x-y plane defined by a cut at z/2 for a DSSWG waveguide with dimensions of L<sub>s</sub> = L<sub>m</sub> = 220 nm, W<sub>t</sub> = W<sub>m</sub> = W<sub>s</sub> = 220 nm, period Λ = 300 nm, and λ = 1550 nm; Distribution of the z-component; (<b>c</b>) Distribution of the y-z plane in the middle of Si block, and (<b>d</b>) Cross-section in the middle of the gap.</p> Full article ">Figure 3
<p>(<b>a</b>,<b>b</b>) Sensitivity and loss (100 grating periods length) as a function of silicon waveguide block length at 60 nm, 80 nm, 100 nm, 120 nm, 140 nm slot width. (<b>c</b>,<b>d</b>) Sensitivity and loss (100 grating periods length) as a function of duty cycle at 100 nm, 120 nm, 140 nm slot width.</p> Full article ">Figure 4
<p>(<b>a</b>) Sensitivity and Q factor under different fm. (<b>b</b>) Sensitivity and Q factor as under different W<sub>t</sub>.</p> Full article ">Figure 5
<p>(<b>a</b>–<b>c</b>) Q, ER and sensitivity of the HDSSWG-MRR under different coupling gaps.</p> Full article ">Figure 6
<p>Normalized transmission spectrum of the HDSSWG-MRR with the deionized water cladding. The illustration in the green dashed box shows the full width at half height of the main resonant peak more clearly.</p> Full article ">Figure 7
<p>(<b>a</b>) Electric profile of the HDSSWG-MRR at the resonant wavelength. (<b>b</b>) Electric field magnitude distribution in the y-z in the center of silicon block. (<b>c</b>) Electric field magnitude distribution in the x-y plane defined by a cut at z/2.</p> Full article ">Figure 8
<p>(<b>a</b>) The transmission spectra of the SWGRMR refractive index sensor in the different refractive index, and (<b>b</b>) The sensing performance of the single SWGRMR sensor.</p> Full article ">
13 pages, 4501 KiB  
Article
Simulation of a High-Performance Polarization Beam Splitter Assisted by Two-Dimensional Metamaterials
by Ruei-Jan Chang and Chia-Chien Huang
Nanomaterials 2022, 12(11), 1852; https://doi.org/10.3390/nano12111852 - 28 May 2022
Cited by 5 | Viewed by 2532
Abstract
It is challenging to simultaneously consider device dimension, polarization extinction ratio (PER), insertion loss (IL), and operable bandwidth (BW) to design a polarization beam splitter (PBS) that is extensively used in photonic integrated circuits. The function of a PBS is to separate polarizations [...] Read more.
It is challenging to simultaneously consider device dimension, polarization extinction ratio (PER), insertion loss (IL), and operable bandwidth (BW) to design a polarization beam splitter (PBS) that is extensively used in photonic integrated circuits. The function of a PBS is to separate polarizations of light, doubling the transmission bandwidth in optical communication systems. In this work, we report a high-performance PBS comprising two-dimensional subwavelength grating metamaterials (2D SWGMs) between slot waveguides. The 2D SWGMs exhibited biaxial permittivity by tailoring the material anisotropy. The proposed PBS showed PERs of 26.8 and 26.4 dB for TE and TM modes, respectively, and ILs of ~0.25 dB for both modes, with an unprecedented small footprint of 1.35 μm × 2.75 μm working at the wavelength λ = 1550 nm. Moreover, the present structure attained satisfactory PERs of >20 dB and ILs of <0.5 dB within an ultrabroad BW of 200 nm. Full article
(This article belongs to the Special Issue Advance in Nanophotonics)
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Figure 1

Figure 1
<p>(<b>a</b>) 3D diagram with TE (<span class="html-italic">E<sub>x</sub></span>) and TM (<span class="html-italic">E<sub>y</sub></span>) mode profiles in the incident plane; (<b>b</b>) top view; (<b>c</b>) schematic of calculating the resultant effective permittivity <span class="html-italic">ε<sub>emt</sub></span> of 2D SWGMs, which is obtained by sequentially estimating the 1D SWGMs in the <span class="html-italic">z</span> (<span class="html-italic">ε<sub>p</sub></span>) and <span class="html-italic">x</span> directions (<span class="html-italic">ε<sub>emt</sub></span>) on the basis of EMT between slot waveguides; (<b>d</b>) cross-section in <span class="html-italic">xy</span> plane of the present PBS.</p> Full article ">Figure 2
<p>Schematic diagram of the fabrication processes of the designed PBS.</p> Full article ">Figure 3
<p>(left axis) Coupling length of TM mode <span class="html-italic">L<sub>c,</sub></span><sub>TM TM</sub> and (right axis) coupling-length ratio <span class="html-italic">L</span><sub>c,TE</sub>/<span class="html-italic">L</span><sub>c,</sub> versus <span class="html-italic">t</span><sub>s</sub> for the present PBS and the SWs.</p> Full article ">Figure 4
<p>Field contours of the even modes of (<b>a</b>) TE and (<b>b</b>) TM and those of (<b>c</b>) TE and (<b>d</b>) TM of the SWs for <span class="html-italic">W</span><sub>Si</sub> = 400 nm, <span class="html-italic">t</span><sub>s</sub> = 60 nm, <span class="html-italic">h</span><sub>Si</sub> = 150 nm, <span class="html-italic">W</span><sub>Cl</sub> = 75 nm, <span class="html-italic">g</span> = 50 nm, <span class="html-italic">s</span> = 550 nm, and <span class="html-italic">λ</span> = 1550 nm. (<b>e</b>) Field amplitudes at the central lines of the slot along the <span class="html-italic">x</span> directions of (<b>a</b>,<b>c</b>); (<b>f</b>) field amplitudes at the central lines of the slot along the <span class="html-italic">x</span> directions of (<b>b</b>,<b>d</b>).</p> Full article ">Figure 4 Cont.
<p>Field contours of the even modes of (<b>a</b>) TE and (<b>b</b>) TM and those of (<b>c</b>) TE and (<b>d</b>) TM of the SWs for <span class="html-italic">W</span><sub>Si</sub> = 400 nm, <span class="html-italic">t</span><sub>s</sub> = 60 nm, <span class="html-italic">h</span><sub>Si</sub> = 150 nm, <span class="html-italic">W</span><sub>Cl</sub> = 75 nm, <span class="html-italic">g</span> = 50 nm, <span class="html-italic">s</span> = 550 nm, and <span class="html-italic">λ</span> = 1550 nm. (<b>e</b>) Field amplitudes at the central lines of the slot along the <span class="html-italic">x</span> directions of (<b>a</b>,<b>c</b>); (<b>f</b>) field amplitudes at the central lines of the slot along the <span class="html-italic">x</span> directions of (<b>b</b>,<b>d</b>).</p> Full article ">Figure 5
<p><span class="html-italic">y</span> components of (<b>a</b>) magnetic field of the TE mode and (<b>b</b>) electric field of the TM mode, and the total power evolutions of the (<b>c</b>) TE and (<b>d</b>) TM modes of the present structure with device length <span class="html-italic">L</span><sub>D</sub> = 2.75 μm (i.e., the practical <span class="html-italic">L</span><sub>c,TM</sub> with optimal performance) for <span class="html-italic">t</span><sub>s</sub> = 60 nm, <span class="html-italic">h</span><sub>Si</sub> = 150 nm, <span class="html-italic">W</span><sub>Cl</sub> = 75 nm, <span class="html-italic">W</span><sub>Si</sub> = 400 nm, <span class="html-italic">g</span> = 50 nm, <span class="html-italic">s</span> = 550 nm, and <span class="html-italic">λ</span> = 1550 nm.</p> Full article ">Figure 6
<p>(left axis) PER and (right axis) IL of both modes as functions of duty cycles (<b>a</b>) <span class="html-italic">ρ</span><sub>x</sub> and (<b>b</b>) <span class="html-italic">ρ</span><sub>z</sub> at the same parameters as those in <a href="#nanomaterials-12-01852-f004" class="html-fig">Figure 4</a>.</p> Full article ">Figure 7
<p>(left axis) PER and (right axis) IL of both modes as a function of the number of Si strips, <span class="html-italic">N</span> between slot waveguides at the same parameters as those in <a href="#nanomaterials-12-01852-f005" class="html-fig">Figure 5</a>.</p> Full article ">Figure 8
<p>(<b>a</b>) PER and (<b>b</b>) IL versus wavelength at the same parameters as those in <a href="#nanomaterials-12-01852-f004" class="html-fig">Figure 4</a>.</p> Full article ">Figure 9
<p>(left axis) PER and (right axis) IL as functions of variations in the (<b>a</b>) Si strip width Δ<span class="html-italic">W</span><sub>Cl</sub> and (<b>b</b>) slot thickness Δ<span class="html-italic">t<sub>s</sub></span> of the present structure.</p> Full article ">Figure 10
<p>(<b>a</b>) Cross-sectional diagram in <span class="html-italic">xy</span> plane and zooned-in view of a SWGM, where <span class="html-italic">W</span><sub>sw</sub> denotes the difference between the bottom and top of the SWGMs. (<b>b</b>) PER and IL versus <span class="html-italic">W</span><sub>sw</sub>.</p> Full article ">
13 pages, 4319 KiB  
Article
Subwavelength Grating Double Slot Waveguide Racetrack Ring Resonator for Refractive Index Sensing Application
by Nikolay Lvovich Kazanskiy, Svetlana Nikolaevna Khonina and Muhammad Ali Butt
Sensors 2020, 20(12), 3416; https://doi.org/10.3390/s20123416 - 17 Jun 2020
Cited by 55 | Viewed by 5909
Abstract
In this paper, a racetrack ring resonator design based on a subwavelength grating double slot waveguide is presented. The proposed waveguide scheme is capable of confining the transverse electric field in the slots and the gaps between the grating segments. This configuration facilitates [...] Read more.
In this paper, a racetrack ring resonator design based on a subwavelength grating double slot waveguide is presented. The proposed waveguide scheme is capable of confining the transverse electric field in the slots and the gaps between the grating segments. This configuration facilitates a large light–matter interaction which elevates the sensitivity of the device approximately 2.5 times higher than the one that can be obtained via a standard slot waveguide resonator. The best sensitivity of the design is obtained at 1000 nm/RIU by utilizing a subwavelength grating double slot waveguide of period 300 nm. The numerical study is conducted via 2D and 3D finite element methods. We believe that the proposed sensor design can play an important role in the realization of highly sensitive lab-on-chip sensors. Full article
(This article belongs to the Special Issue Sensors Based on Diffraction Structures)
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Figure 1

Figure 1
<p>Schematic of (<b>a</b>) Single slot waveguide, (<b>b</b>) Double slot waveguide (<b>c</b>) Subwavelength grating single slot waveguide, (<b>d</b>) Subwavelength grating double slot waveguide.</p> Full article ">Figure 2
<p>The transmission spectrum of GDSWG which is divided into two regions—photonic bandgap and subwavelength region. Inset of the figure shows the E<sub>z</sub> plot of a WG in both the regions.</p> Full article ">Figure 3
<p>(<b>a</b>) Real part of the effective refractive index of SSWG and DSWG, (<b>b</b>) Mode sensitivity analysis, (<b>c</b>) E-field distribution in SSWG and DSWG at W<sub>rail</sub> = 200 and 400 nm.</p> Full article ">Figure 4
<p>E-field distribution in the cross-sectional view, top view and line cut profile of electric field intensity of (<b>a</b>) SSWG, (<b>b</b>) DSWG, (<b>c</b>) GSSWG, (<b>d</b>)GDSWG.</p> Full article ">Figure 5
<p>Variation of (<b>a</b>) Γ<sub>slot</sub> + Γ<sub>gap</sub>, (<b>b</b>) <span class="html-italic">Γ<sub>c</sub></span>, (<b>c</b>) Transmission (dB), on the WG width (<span class="html-italic">W<sub>rail</sub></span>).</p> Full article ">Figure 6
<p>Schematic of race track resonator based on (<b>a</b>) SSWG, <b>(b)</b> DSWG, (<b>c</b>) GSSWG, (<b>d</b>) GDSWG.</p> Full article ">Figure 7
<p>Determination of resonance wavelength of (<b>a</b>) SSWG and DSWG, (<b>b</b>) GSSWG and GDSWG. Extinction ratio (<span class="html-italic">ER</span>) of (<b>c</b>) SSWG and DSWG, (<b>d</b>) GSSWG and GDSWG.</p> Full article ">Figure 8
<p>E-field distribution in (<b>a</b>) SSWG resonator, (<b>b</b>) DSWG resonator, (<b>c</b>) GSSWG resonator, (<b>d</b>)GDSWG resonator. The inset shows the zoomed section of the ring resonator at <span class="html-italic">λ<sub>res</sub></span>.</p> Full article ">Figure 9
<p>(<b>a</b>) Sensitivity, (<b>b</b>) <span class="html-italic">FOM</span>, (<b>c</b>) <span class="html-italic">Q-factor</span> of all four designs.</p> Full article ">
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