Search Results (421)

High-performance acoustic resonators based on single-crystalline piezoelectric thin films have great potential in wireless communication applications. This paper presents the modeling, fabrication, and characterization of laterally excited bulk resonators (XBARs) utilizing the suspended ultra-thin (~420 nm) LiTaO₃ (LT, with 42° YX-cut) film. The finite element analysis (FEA) was performed to model the LT-based XBARs precisely and to gain further insight into the physical behaviors of the acoustic waves and the loss mechanisms. In addition, the temperature response of the devices was numerically calculated, showing relatively low temperature coefficients of frequency (TCF) of ~−38 ppm/K for the primary resonant mode. The LT-based XBARs were fabricated and characterized, which presents a multi-resonant mode over a wide frequency range (0.1~10 GHz). For the primary resonance around 4.1 GHz, the fabricated devices exhibited a high-quality factor (Bode-Q) ~ 600 and piezoelectric coupling (k_t²) ~ 2.84%, while the higher-harmonic showed a greater value of k_t² ~ 3.49%. To lower the resonant frequency of the resonator, the thin SiO₂ film (~20 nm) was sputtered on the suspended device, which created a frequency offset between the series and shunt resonators. Finally, a ladder-type narrow band filter employing five XBARs was developed and characterized. This work effectively demonstrates the performance and application potential of micro-acoustic resonators employing high-quality LT films. Full article

The detachment of railway tunnel lining constitutes a grave danger to train operation safety and drastically curtails the tunnel’s service life. This study endeavors to efficiently detect the void defects in railway tunnel lining by creating a finite element model of tunnel lining structures. Utilizing this model, the study simulates the nonlinear acoustic wave propagation cloud maps for three representative tunnel lining structures: void-free, air void, and water void. This facilitates a thorough examination of the acoustic signal characteristics in the wavefield, time domain, and frequency domain. To satisfy the precision and efficiency demands of tunnel lining void detection, this study has devised and developed a portable acoustic detector that incorporates automatic analysis and processing capabilities and is furnished with a high-performance rare-earth magneto-strictive acoustic excitation device. This detection system can swiftly detect and assess typical void defects in tunnel lining. To further validate the effectiveness of this system, this study conducted lining defect detection in the Pingdao Railway Tunnel in the eastern Qinling Mountains. The test results show that the detection rate of this system for both air-filled and water-filled voids with a width of 1 m reached 100%, demonstrating its extremely high application value. Full article

Smart sensors and networks have spread worldwide over the past few decades. In the industry field, these concepts have found an increasing quantity of applications. The omnipresence of smart sensor networks and smart devices, especially in the industrial world, has contributed to the emergence of the concept of Industry 4.0. In a world where everything is interconnected, communication among smart devices is critical to technological development in the field of smart industry. To improve communication, many engineers and researchers implemented methods to standardize communication along the various levels of the ISO-OSI model, from hardware design to the implementation and standardization of different communication protocols. The objective of this paper is to study and implement an unconventional type of communication, exploiting acoustic wave propagation on metallic structures, starting from the state of the art, and highlighting the advantages and disadvantages found in existing literature, trying to overcome them and describing the progress beyond the state of the art. The proposed application for acoustic communication targets the field of smart industries, where implementing signal transmission via wireless or wired methods is challenging due to interference from the widespread presence of metallic structures. This study explores an innovative approach to acoustic communication, with a particular focus on the physical challenges related to acoustic wave propagation. Additionally, communication performance is examined in terms of noise rejection, analyzing the impact of injected acoustic noise on communication efficiency. Full article

Magnetohydrodynamic (MHD) generators are direct energy conversion devices that transform the motion of an electrically conducting fluid into electricity through interaction with a magnetic field. Developed as an alternative to conventional turbine-generator systems, MHD generators evolved through the 20th century from large units, which are intended to transform thermal energy into electricity using plasma as a working fluid, to smaller units that can harness heat from a variety of sources. In the last few decades, an effort has been made to develop energy conversion systems that incorporate MHD generators to harvest renewable sources such as solar and ocean energy, strengthening the sustainability of this technology. This review briefly synthesizes the main steps in the evolution of MHD technology for electricity generation, starting by outlining its physical principles and the proposals to convert thermal energy into electricity, either using a high-temperature plasma as a working fluid or a liquid metal in a one- or two-phase flow at lower temperatures. The use of wave energy in the form of acoustic waves, which were obtained from the conversion of thermal energy through thermoacoustic devices coupled to liquid metal and plasma MHD generators, as well as alternatives for the transformation of environmental energy resources employing MHD transducers, is also assessed. Finally, proposals for the conversion of ocean energy, mainly in the form of waves and tides, into electric energy, through MHD generators using either seawater or liquid metal as working fluids, are presented along with some of the challenges of MHD conversion technology. Full article

Metamaterials enable the modulation of elastic waves or acoustic waves in unprecedented ways and have a wide range of potential applications. This paper achieves the simultaneous manipulation of surface elastic waves (SEWs) and surface acoustic waves (SAWs) using two-dimensional acousto-elastic metamaterials (AEMMs). The proposed AEMMs are composed of periodic hollow cylinders on the surface of a semi-infinite substrate. The band diagrams and the frequency responses of the AEMMs are numerically calculated through the finite element approach. The band diagrams exhibit simultaneous bandgaps for the SEWs and SAWs, which can also be effectively tuned by the modification of AEMM geometry. Furthermore, we construct the AEMM waveguide by the introduction of a line defect and hence demonstrate its ability to guide the SEWs and SAWs simultaneously. We expect that the proposed AEMMs will contribute to the development of multi-functional wave devices, such as filters for dual waves in microelectronics or liquid sensors that detect more than one physical property. Full article

For the acousto-optic tunable filter (AOTF)-based spectral imaging systems, the diffraction efficiency of the AOTF is a primary factor affecting system throughput. Moreover, the distribution of the acoustic field within the AOTF fundamentally determines the device’s diffraction efficiency. Thus, the design of an AOTF device including a transducer and absorber to achieve a uniform acoustic field distribution plays an important role in improving diffraction efficiency. This study proposed an acoustic absorbing structure using mercurous halide crystals’ strong acoustic anisotropy to realize the conversion from shear horizontal wave to surface wave at the boundary and rapid dissipation. Snell’s law for acoustically anisotropic media is employed to design the angle of the acoustic absorbing structure. Experiments of mercurous halide-based AOTF demonstrate that this absorbing structure can effectively enhance diffraction efficiency. Full article

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO₃ thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO₃ thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO₃ thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. Full article

To realize highly sensitive SAW devices, novel Al–Cu thin films were developed using a combinatorial sputtering system. The Al–Cu sample library exhibited a wide range of chemical compositions and electrical resistivities, providing valuable insights for selecting optimal materials for SAW devices. Considering the significant influence of electrode resistivity and density on acoustic wave propagation, an Al–Cu film with 65 at% Al was selected as the IDT electrode material. The selected Al–Cu film demonstrated a resistivity of 6.0 × 10⁻⁵ Ω-cm and a density of 4.4 g/cm³, making it suitable for SAW-based microfluidic actuator applications. XRD analysis revealed that the Al–Cu film consisted of a physical mixture of Al and Cu without the formation of Al–Cu alloy phases. The film exhibited a fine-grained microstructure with an average crystallite size of 7.5 nm and surface roughness of approximately 6 nm. The SAW device fabricated with Al–Cu IDT electrodes exhibited excellent acoustic performance, resonating at 143 MHz without frequency shift and achieving an insertion loss of −13.68 dB and a FWHM of 0.41 dB. In contrast, the Au electrode-based SAW device showed significantly degraded acoustic characteristics. Moreover, the SAW-based microfluidic module equipped with optimized Al–Cu IDT electrodes successfully separated 5 μm polystyrene (PS) particles even at high flow rates, outperforming devices with Au IDT electrodes. This enhanced performance can be attributed to the improved resonance characteristics of the SAW device, which resulted in a stronger acoustic radiation force exerted on the PS particles. Full article

In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, and their spacing on the performance of the SAW device. The impact of the transversal mode of quartz SAWs on the device was subsequently examined using the finite element method (FEM). The simulation results indicate that optimizing these structural parameters significantly enhances the sensor’s sensitivity and frequency stability. SAW devices with optimal structural parameters were fabricated, and their resonant frequencies were tested across a temperature range of 25–150 °C. Experimental results demonstrate that the SAW temperature sensor maintains high performance stability and data reliability throughout the entire temperature range, achieving a Bode-Q of 7700. Furthermore, the sensor exhibits excellent linearity and repeatability. An analysis of the sensor’s response under varying temperature conditions reveals a significant temperature dependency on its Temperature Coefficient of Frequency (TCF). This feature suggests that the sensor possesses potential advantages for applications in industrial process control and environmental monitoring. Full article

The use of artificial intelligence in diverse diagnosis areas has significantly increased in the past few years because of the advantages it represents in clinical routine. Among the diverse diagnostic techniques, the use of ultrasounds is often preferred because of their simplicity, low cost, non-invasiveness, and non-ionizing characteristic. However, obtaining an adequate number of patients and data for training and testing machine learning models is challenging. To overcome this limitation, a novel approach is proposed for simulating data produced by ultrasonic diagnostic devices. The implemented method was based on a clinical prototype for eye cataract diagnosis, although the method can be extended to other applications as well. The proposed model encompasses the electric-to-acoustic signal conversion in the ultrasonic transducer, the wave propagation through the biological medium, and the subsequent acoustic-to-electric signal conversion in the transducer. Electrical modelling of the transducer was performed using a two-port network approach, while the acoustic wave propagation was modelled by using the k-Wave MATLAB toolbox. It was verified that the holistic modelling approach enabled the generation of synthetic data augmentation, presenting high similarity with real data. Full article

The small dimensions of microfluidic channels allow for fast diffusive or passive mixing, which is beneficial for time-sensitive applications such as chemical reactions, biological assays, and the transport of to-be-detected species to sensors. In microfluidics, the need for fast mixing within milliseconds arises primarily because these devices are often used in fields where rapid and efficient mixing significantly impacts the performance and outcome of the processes. Active mixing with acoustics in microfluidic devices involves using acoustic waves to enhance the mixing of fluids within microchannels. Using sharp corners and wall patterns in acoustofluidic devices significantly enhances the mixing by acoustic streaming around these features. The streaming patterns around the sharp edges are particularly effective for the mixing because they can produce strong lateral flows that rapidly homogenize liquids. This work presents extensive characterizations of the effect of sharp-edged structures on acoustic mixing in bulk acoustic wave (BAW) mode in a silicon microdevice. The effect of side wall patterns in different angles and shapes, their positions, the type of piezoelectric transducer, and its amplitude and frequency have been studied. Following the patterning of the channel walls, a mixing time of 25 times faster was reached, compared to channels with smooth side walls exhibiting conventional BAW behavior. The average locally determined acoustic streaming velocity inside the channel becomes 14 times faster if sharp corners of 10° are added to the wall. Full article

Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, coupled beam arrays is then demonstrated using a lumped element model, and the conditions for full power transfer are established. Four-port devices, including directional couplers and coupler filters with complementary transmission ports, are then demonstrated. Predictions are verified for realistic device layouts using the stiffness matrix method. Full article

A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In this paper, a honeycomb-shaped phononic crystal structure based on 42°Y-X LT/SiO₂/poly-Si/Si-layered substrate is proposed. The analysis of the bandgap distribution under various filling fractions was carried out using dispersion and transmission characteristics. In order to study the application of PnCs in SAW devices, one-port resonators with different reflectors were compared and analyzed. Based on the frequency response curves and Bode-Q value curves, it was found that when the HC-PnC structure is used as a reflector, it can not only improve the transmission loss of the resonator but also reduce the size of the device. Full article

Cardiovascular disease (CVD) represents the leading cause of death worldwide. For individuals at elevated risk for cardiovascular disease, early detection and monitoring of lipid status is imperative. The majority of lipid measurements conducted in hospital settings employ optical detection, which necessitates the use of relatively large-sized detection machines. It is, therefore, necessary to develop point-of-care testing (POCT) for lipoprotein in order to monitor CVD. To enhance the management and surveillance of CVD, this study sought to develop a POCT approach for apolipoprotein B (ApoB) utilizing a shear horizontal surface acoustic wave (SH-SAW) platform to assess the risk of heart disease. The platform employs a reflective SH-SAW sensor to reduce the sensor size and enhance the phase-shifted signals. In this study, the platform was utilized to monitor the impact of a weekly almond and oat milk or statins intervention on alterations in CVD risk. The SH-SAW ApoB test exhibited a linear range of 0 to 212 mg/dL, and a coefficient correlation (R) of 0.9912. Following a four-week intervention period, both the almond and oat milk intervention (−23.3%, p < 0.05) and statin treatment (−53.1%, p < 0.01) were observed to significantly reduce ApoB levels. These findings suggest that the SH-SAW POCT device may prove a valuable tool for monitoring CVD risk, particularly during routine daily or weekly follow-up visits. Full article

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development. Full article