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12 pages, 5721 KiB  
Article
Realizing Multi-Parameter Measurement Using PT-Symmetric LC Sensors
by Bin-Bin Zhou, Dan Chen, Chi Zhang and Lei Dong
Sensors 2024, 24(20), 6570; https://doi.org/10.3390/s24206570 - 12 Oct 2024
Viewed by 465
Abstract
With the rapid development in sensor network technology, the complexity and diversity of application scenarios have put forward more and more new requirements for inductor–capacitor (LC) sensors, for instance, multi-parameter simultaneous monitoring. Here, the parity–time (PT) symmetry concept in quantum mechanics [...] Read more.
With the rapid development in sensor network technology, the complexity and diversity of application scenarios have put forward more and more new requirements for inductor–capacitor (LC) sensors, for instance, multi-parameter simultaneous monitoring. Here, the parity–time (PT) symmetry concept in quantum mechanics is applied to LC passive wireless sensing. Two or even three parameters can be monitored simultaneously by observing the frequency response of the reflection coefficient at the end of the readout circuit. In particular, for three-parameter detection, a novel detection method is studied to extract the three resonant frequencies of the system through the phase–frequency characteristics of the reflection coefficient, which has never appeared in the previous literature on PT symmetry. The changes in three resonant frequencies are in response to changes in the three parameters in the environment. We show theoretically and demonstrate experimentally that the PT-symmetric LC sensor can realize multi-parameter measurement using a series LCR circuit as the sensor and a symmetric adjustable LCR circuit as the readout circuit. Our work paves the way for applying PT symmetry in multi-parameter detection. Full article
(This article belongs to the Section Electronic Sensors)
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<p>The PT-symmetric <span class="html-italic">LC</span> passive wireless multi-parameter sensing system. (<b>a</b>) The simplified circuit model of the PT-symmetric <span class="html-italic">LC</span> sensing system. (<b>b</b>) The equivalent circuit diagram of the PT-symmetrical <span class="html-italic">LC</span> sensing system for single-port measurement. (<b>c</b>) The real parts and (<b>d</b>) imaginary parts of the eigenfrequencies <math display="inline"><semantics> <mrow> <msub> <mrow> <mi>ω</mi> </mrow> <mrow> <mn>1,2</mn> </mrow> </msub> </mrow> </semantics></math> as a function of the varying capacitance and resistance, assuming <span class="html-italic">L</span> = 5 μH and <span class="html-italic">k</span> = 0.1.</p>
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<p>The PT-symmetric <span class="html-italic">LC</span> passive wireless multi-parameter sensing system. (<b>a</b>) The simplified circuit model of the PT-symmetric <span class="html-italic">LC</span> sensing system. (<b>b</b>) The equivalent circuit diagram of the PT-symmetrical <span class="html-italic">LC</span> sensing system for single-port measurement. (<b>c</b>) The real parts and (<b>d</b>) imaginary parts of the eigenfrequencies <math display="inline"><semantics> <mrow> <msub> <mrow> <mi>ω</mi> </mrow> <mrow> <mn>1,2</mn> </mrow> </msub> </mrow> </semantics></math> as a function of the varying capacitance and resistance, assuming <span class="html-italic">L</span> = 5 μH and <span class="html-italic">k</span> = 0.1.</p>
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<p>The frequency responses as a function of the sensitive capacitance and resistance. (<b>a</b>) The simulated reflection spectrum under different capacitances, with resistance <span class="html-italic">R</span><sub>s</sub> = 10 Ω. (<b>b</b>) The theoretical (blue and orange lines) and simulated (blue and orange symbols) frequency responses as a function of varying the capacitance <span class="html-italic">C</span><sub>s</sub>, with the simulated results extracted from (<b>a</b>). (<b>c</b>) The theoretical (blue and orange lines) and simulated (blue and orange symbols) frequency responses as a function of varying the resistance <span class="html-italic">R</span><sub>s</sub>, with <span class="html-italic">C</span><sub>s</sub> = 10 pF. The theoretical (surfaces) and simulated (yellow symbols) (<b>d</b>) frequencies <span class="html-italic">f</span><sub>1</sub> and (<b>e</b>) frequencies <span class="html-italic">f</span><sub>2</sub> responses as a function of varying the capacitance <span class="html-italic">C</span><sub>s</sub> and resistance <span class="html-italic">R</span><sub>s</sub>.</p>
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<p>Simulated frequency responses as a function of varying the parameters. (<b>a</b>) Reflection spectrums under different capacitances. (<b>b</b>) Reflection spectrums under different resistances. (<b>c</b>) Reflection spectrums under different coupling coefficients. (<b>d</b>) Reflection spectrums as a function of varying the capacitance <span class="html-italic">C</span><sub>s</sub>, resistance <span class="html-italic">R</span><sub>s</sub>, and coupling coefficient <span class="html-italic">k</span>.</p>
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<p>The experimental setup of the PT-symmetric <span class="html-italic">LC</span> wireless sensor. (<b>a</b>) Experimental instruments; (<b>b</b>) experimental circuits.</p>
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<p>Measured variation in the sensitive parameters with the environment. (<b>a</b>) The variation in the capacitance <span class="html-italic">C</span>2 value with humidity. (<b>b</b>) The variation in the resistance <span class="html-italic">R</span>2 value with illuminance. (<b>c</b>) The variation in the coupling coefficient <span class="html-italic">k</span> with the coupling distance <span class="html-italic">d</span>.</p>
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<p>Measured frequency responses as a function of the sensitive parameters. (<b>a</b>) Reflection spectrums with different relative humidities. (<b>b</b>) Reflection spectrums with different illuminances. (<b>c</b>) Reflection spectrums with different coupling distance. (<b>d</b>) Reflection spectrums as a function of varying the relative humidity, illuminance, and coupling distance.</p>
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21 pages, 4797 KiB  
Article
Design and Optimization of an Ultra-Low-Power Cross-Coupled LC VCO with a DFF Frequency Divider for 2.4 GHz RF Receivers Using 65 nm CMOS Technology
by Muhammad Faisal Siddiqui, Mukesh Kumar Maheshwari, Muhammad Raza and Aurangzeb Rashid Masud
J. Low Power Electron. Appl. 2023, 13(4), 54; https://doi.org/10.3390/jlpea13040054 - 7 Oct 2023
Cited by 2 | Viewed by 3486
Abstract
This article presents the design and optimization of a tunable quadrature differential LC CMOS voltage-controlled oscillator (VCO) with a D flip-flop (DFF) frequency divider. The VCO is designed for the low-power and low-phase-noise applications of 2.4 GHz IoT/BLE receivers and wireless sensor devices. [...] Read more.
This article presents the design and optimization of a tunable quadrature differential LC CMOS voltage-controlled oscillator (VCO) with a D flip-flop (DFF) frequency divider. The VCO is designed for the low-power and low-phase-noise applications of 2.4 GHz IoT/BLE receivers and wireless sensor devices. The proposed design comprises the proper stacking of an LC VCO and a DFF frequency divider and is simulated using a TSMC 65 nm CMOS technology, and it has a tuning range of 4.4 to 5.7 GHz. The voltage headroom is preserved using a high-impedance on-chip passive inductor at the tail for filtering and enabling true differential operation. The VCO and frequency divider consume as low as 2.02 mW altogether, with the VCO section consuming only 0.47 mW. The active area of the chip including the pads is only 0.47 mm2. The designed VCO achieved a much better phase noise of −118.36 dBc/Hz at a 1 MHz offset frequency with 1.2 V supply voltages. The design produced a much better FoM of −196.44 dBc/Hz compared to other related research. Full article
(This article belongs to the Special Issue Ultra-Low-Power ICs for the Internet of Things Vol. 2)
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<p>The schematic of the proposed differentially quadrature differential cross-coupled PMOS and NMOS LC-VCO with a tail inductor.</p>
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<p>Design flow of ULP LC-VCO.</p>
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<p>The schematic of the proposed CML D flip-flop 1/2 frequency divider.</p>
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<p>The latch-to-driver width ratio (W<sub>L</sub>/W<sub>D</sub>) concerning the input frequency range response.</p>
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<p>The input frequency ranges as a function of W<sub>CLK</sub>.</p>
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<p>Phase noise v/s frequency at different control voltages.</p>
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<p>Phase noise −118.36 @ 1 MHz offset frequency.</p>
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<p>Frequency v/s control voltages.</p>
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<p>The proposed VCO’s time domain output waveform.</p>
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<p>The quadrature time domain output waveform of the proposed VCO with a frequency divider.</p>
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<p>Layout of proposed ULP-VCO using 65 nm CMOS technology.</p>
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15 pages, 7212 KiB  
Article
A Novel-Structure LC Resonant Passive Wireless Sensor for NO2 Sensing
by Zhiyang Liu, Yanbai Shen, Sikai Zhao, Jinzhou Bai, Ruixue Ma, Shuling Gao, Wengang Liu and Qiang Zhao
Chemosensors 2023, 11(7), 359; https://doi.org/10.3390/chemosensors11070359 - 25 Jun 2023
Viewed by 1576
Abstract
This work presents an LC resonant passive wireless gas sensor with a novel structure designed to mitigate the negative impact of substrate. The LC sensor antenna in the new structure, and the reader antenna, were designed and optimized utilizing HFSS software to improve [...] Read more.
This work presents an LC resonant passive wireless gas sensor with a novel structure designed to mitigate the negative impact of substrate. The LC sensor antenna in the new structure, and the reader antenna, were designed and optimized utilizing HFSS software to improve the transfer efficiency. The superiority of the designed structure compared with general examples is highlighted and verified. The change in the substrate capacitance essentially makes no interference with the parameters of the LC sensor to be measured. The sensor for the new structure was prepared by combining etching and sputtering methods. The ZnO nanowires (NWs) were characterized to confirm their high purity and wurtzite crystal structure. The LC gas sensors demonstrated excellent wireless sensing performance, including a low detection limit of 0.5 ppm NO2, high response of 1.051 and outstanding stability at 180 °C. The newly developed sensor structure not only prevented interference from the substrate during gas sensing testing, but also expanded the choice of sensor substrates, playing a critical role in the development of sensors based on the LC resonance principle. Full article
(This article belongs to the Special Issue Chemical Sensors for Volatile Organic Compound Detection, 2nd Edition)
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<p>(<b>a</b>) Schematic diagram of the LC gas sensor; (<b>b</b>) Simulation model.</p>
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<p>Schematic diagram of the manufacturing process of the LC gas sensor.</p>
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<p>(<b>a</b>) Schematic diagram of the wireless gas sensing measurement setup; (<b>b</b>) equivalent circuit of the wireless gas sensing measurement.</p>
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<p>(<b>a</b>) Side length optimization of the reader antenna; (<b>b</b>) height optimization of the reader antenna; (<b>c</b>) variation of <span class="html-italic">S</span><sub>11</sub> of the LC antenna; (<b>d</b>) VSWR result of the LC antenna.</p>
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<p>(<b>a</b>) Structure diagram of the LC sensor; (<b>b</b>) physical picture of the LC sensor.</p>
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<p>Comparison of two gas sensor structures. (<b>a</b>) Contacted; (<b>b</b>) Uncontacted.</p>
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<p>Schematic diagram of the simulation model of two structure LC sensors. (<b>a</b>) Contacted; (<b>b</b>) uncontacted.</p>
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<p>Effect of capacitance variation on (<b>a</b>) <math display="inline"><semantics><mrow><msub><mrow><mi>S</mi></mrow><mrow><mn>11</mn></mrow></msub></mrow></semantics></math> and (<b>b</b>) <math display="inline"><semantics><mrow><msub><mrow><mi>f</mi></mrow><mrow><mn>0</mn></mrow></msub></mrow></semantics></math> for two different structures.</p>
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<p>XRD pattern of ZnO NWs.</p>
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<p>(<b>a</b>,<b>b</b>) SEM images, (<b>c</b>–<b>e</b>) TEM images, and (<b>f</b>) SAED pattern of ZnO NWs.</p>
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<p>XPS spectra of ZnO NWs. (<b>a</b>) Survey scan spectrum; (<b>b</b>) Zn 2p spectrum; (<b>c</b>) O 1s spectrum.</p>
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<p>Frequency response of the LC antenna, LC gas sensor, and the reference templates in air and in NO<sub>2</sub>.</p>
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<p>(<b>a</b>) Sensor response and (<b>b</b>) response/recovery times of the LC sensor to 1 ppm NO<sub>2</sub> at different operating temperatures; (<b>c</b>) response–recovery curves and (<b>d</b>) sensor response of the LC sensor to different concentrations of NO<sub>2</sub> at 180 °C.</p>
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<p>(<b>a</b>) Response–recovery curves of the LC sensor to 1 ppm NO<sub>2</sub> at 180 °C over five consecutive tests; (<b>b</b>) response of the LC sensor to 1 ppm NO<sub>2</sub> at 180 °C in 60 days.</p>
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<p>Responses of the LC sensor to different types of gases.</p>
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<p>Schematic diagram of sensing mechanism of the LC gas sensor to NO<sub>2</sub>.</p>
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13 pages, 4855 KiB  
Article
GO/CNT−OH/Nafion Nanocomposite Humidity Sensor Based on the LC Wireless Method
by Chengkai Wang, Chunxiao Jiao, Meng Wang, Jinghong Pan and Qi Wang
Nanomaterials 2023, 13(13), 1925; https://doi.org/10.3390/nano13131925 - 24 Jun 2023
Cited by 1 | Viewed by 1380
Abstract
In recent years, LC resonant sensors have gained widespread attention for their extensive applications in industries such as pharmaceutical storage and food transportation. A wireless passive sensor with a good sensing performance is proposed based on a GO/CNT−OH/Nafion nanocomposite. The sensor was fabricated [...] Read more.
In recent years, LC resonant sensors have gained widespread attention for their extensive applications in industries such as pharmaceutical storage and food transportation. A wireless passive sensor with a good sensing performance is proposed based on a GO/CNT−OH/Nafion nanocomposite. The sensor was fabricated via inkjet printing technology, and the surface morphology of the GO/CNT−OH/Nafion nanocomposite was characterized by SEM measurement. It is found that the MWCNTs support the GO layer and the hydrophobic chains of Nafion interact with the hydrophobic layer of GO, resulting in a larger cavity and hydrophilic surface of the entire material. This structure well reflects the fact that the mixing of MWCNTs and Nafion provides the entire material with a stronger water absorption. The experimental study shows that the proposed humidity sensor has a frequency variation of 103 kHz/%RH at low humidity (30–60% RH) and a sensitivity of 931 kHz/%RH at high humidity (60–95% RH), while the sensitivity value from 30–95% RH is 547 kHz/% RH. The response time and recovery time are 110 s and 115 s, respectively. In addition, the tests showed that the GO/CNT−OH/Nafion nanocomposite applied to the humidity sensor had a maximum humidity hysteresis of about 3% RH at 30–95% RH, the resonant frequency remained basically unchanged after 50 h of testing, and the whole sensor possessed a good stability. After conducting several repeated experiments, it was found that the resonant frequency error of the whole sensor was low and did not affect the overall sensing test, which proved the reproducible preparation of the sensor. Finally, the humidity-sensing mechanism of the proposed sensor was analyzed in this paper, and it was found that GO enhanced the hygroscopic properties of GO/CNT−OH/Nafion nanocomposite when it was supported by MWCNT-OH and included uniformly dispersed Nafion. Therefore, our proposed humidity sensor is suitable for humidity detection above 30% RH in both sealed and open environments. Full article
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<p>(<b>a</b>) Equivalent circuit of LC humidity sensor; (<b>b</b>) image of the designed GO/CNT−OH/Nafion nanocomposite humidity sensor; (<b>c</b>) preparation process of GO/MWCNT/Nafion nanocomposites; (<b>d</b>) preparation process of the device.</p>
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<p>SEM images of (<b>a</b>) GO, (<b>b</b>) Nafion, (<b>c</b>) GO/Nafion, and (<b>d</b>) GO/CNT−OH/Nafion samples.</p>
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<p>(<b>a</b>) SEM images of GO/CNT−OH/Nafion nanocomposites at 1 micron size; (<b>b</b>) element distribution of GO/CNT−OH/Nafion nanocomposites.</p>
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<p>Test schematic diagram of sensor.</p>
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<p>(<b>a</b>) Frequency shifts of the GO, CNT−OH/GO, and GO/CNT−OH/Nafion sensor; (<b>b</b>) S<sub>11</sub>−frequency results of the GO/CNT−OH/Nafion humidity sensor in 30–95% RH; frequency versus humidity curve of the GO/CNT−OH/Nafion humidity sensor (<b>c</b>) in a low humidity range (30–60% RH) and (<b>d</b>) in a high humidity range (60–95% RH); (<b>e</b>) signal level of GO/CNT−OH/Nafion humidity sensor in 30–95% RH; (<b>f</b>) image of resonant frequency with error bars as a function of humidity.</p>
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<p>(<b>a</b>) The measurement appliance for response, recovery and repeatability tests; (<b>b</b>) the response and recovery, (<b>c</b>) repeatability, and (<b>d</b>) stability tests of the wireless GO/CNT−OH/Nafion humidity sensor.</p>
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<p>(<b>a</b>) Interaction between GO and water molecules; (<b>b</b>) interaction between MWCNTs/GO and water molecules.</p>
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<p>(<b>a</b>) Interaction between GO/MWCNT−OH/Nafion nanocomposites and water molecules; (<b>b</b>) dissociation of the sulfonic acid group of Nafion in water to create protons and hydrated protons.</p>
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<p>Sensing mechanism of humidity sensor (<b>a</b>) in a low humidity range (30–60% RH) and (<b>b</b>) a high humidity range (60–95% RH).</p>
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15 pages, 2181 KiB  
Review
PT-Symmetric LC Passive Wireless Sensing
by Dong-Yan Chen, Lei Dong and Qing-An Huang
Sensors 2023, 23(11), 5191; https://doi.org/10.3390/s23115191 - 30 May 2023
Cited by 3 | Viewed by 2249
Abstract
Parity–time (PT) symmetry challenges the long-held theoretical basis that only Hermitian operators correspond to observable phenomena in quantum mechanics. Non-Hermitian Hamiltonians satisfying PT symmetry also have a real-valued energy spectrum. In the field of inductor–capacitor (LC) passive wireless sensors, PT symmetry [...] Read more.
Parity–time (PT) symmetry challenges the long-held theoretical basis that only Hermitian operators correspond to observable phenomena in quantum mechanics. Non-Hermitian Hamiltonians satisfying PT symmetry also have a real-valued energy spectrum. In the field of inductor–capacitor (LC) passive wireless sensors, PT symmetry is mainly used for improving performance in terms of multi-parameter sensing, ultrahigh sensitivity, and longer interrogation distance. For example, the proposal of both higher-order PT symmetry and divergent exceptional points can utilize a more drastic bifurcation process around exceptional points (EPs) to accomplish a significantly higher sensitivity and spectral resolution. However, there are still many controversies regarding the inevitable noise and actual precision of the EP sensors. In this review, we systematically present the research status of PT-symmetric LC sensors in three working areas: exact phase, exceptional point, and broken phase, demonstrating the advantages of non-Hermitian sensing concerning classical LC sensing principles. Full article
(This article belongs to the Special Issue IoT Sensors Development and Application for Environment & Safety)
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<p>The schematic transition of real and imaginary parts in the eigenvalues from PT-symmetric exact phase to PT-symmetric broken phase.</p>
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<p>The schematic of the PT-symmetric <span class="html-italic">LC</span> passive wireless sensor.</p>
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<p>The schematic of PT-symmetric <span class="html-italic">LC</span> passive wireless sensor for multi-parameter measurement in the single-port.</p>
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<p>The PT-symmetric-coupled resonator system: (<b>a</b>) asymmetric perturbation and (<b>b</b>) symmetric perturbation.</p>
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<p><span class="html-italic">N</span>th-order PT-symmetric <span class="html-italic">RLC</span> telemetric electric circuit with <span class="html-italic">N</span> = 2 and <span class="html-italic">N</span> = 3.</p>
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<p>Schematic of the PT-symmetric electromechanical accelerometer.</p>
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<p>(<b>a</b>) The circuit schematic of conventional and PT-symmetric LC passive wireless sensing systems; (<b>b</b>) reflection coefficient <span class="html-italic">S</span><sub>11</sub>, at the resonant frequency of the remote system, as a function of coupling strength <span class="html-italic">k</span> for conventional and PT-symmetric <span class="html-italic">LC</span> passive wireless sensors.</p>
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21 pages, 5458 KiB  
Article
Passive Wireless Pressure Gradient Measurement System for Fluid Flow Analysis
by Partha P. Dutta, Alexander C. Benken, Tao Li, John Richard Ordonez-Varela and Yogesh B. Gianchandani
Sensors 2023, 23(5), 2525; https://doi.org/10.3390/s23052525 - 24 Feb 2023
Cited by 5 | Viewed by 2506
Abstract
Using distributed MEMS pressure sensors to measure small flow rates in high resistance fluidic channels is fraught with challenges far beyond the performance of the pressure sensing element. In a typical core-flood experiment, which may last several months, flow-induced pressure gradients are generated [...] Read more.
Using distributed MEMS pressure sensors to measure small flow rates in high resistance fluidic channels is fraught with challenges far beyond the performance of the pressure sensing element. In a typical core-flood experiment, which may last several months, flow-induced pressure gradients are generated in porous rock core samples wrapped in a polymer sheath. Measuring these pressure gradients along the flow path requires high resolution pressure measurement while contending with difficult test conditions such as large bias pressures (up to 20 bar) and temperatures (up to 125 °C), as well as the presence of corrosive fluids. This work is directed at a system for using passive wireless inductive-capacitive (LC) pressure sensors that are distributed along the flow path to measure the pressure gradient. The sensors are wirelessly interrogated with readout electronics placed exterior to the polymer sheath for continuous monitoring of experiments. Using microfabricated pressure sensors that are smaller than ø15 × 3.0 mm3, an LC sensor design model for minimizing pressure resolution, accounting for sensor packaging and environmental artifacts is investigated and experimentally validated. A test setup, built to provide fluid-flow pressure differentials to LC sensors with conditions that mimic placement of the sensors within the wall of the sheath, is used to test the system. Experimental results show the microsystem operating over full-scale pressure range of 20,700 mbar and temperatures up to 125 °C, while achieving pressure resolution of <1 mbar, and resolving gradients of 10–30 mL/min, which are typical in core-flood experiments. Full article
(This article belongs to the Special Issue Advanced Sensors in MEMS)
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<p>Cross-sectional view of a passive wireless pressure gradient measurement (PGM) system. LC sensors and readout nodes can be scaled to <span class="html-italic">n</span> elements, <span class="html-italic">n</span> = 4 in this work.</p>
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<p>(<b>a</b>) Wireless inductive Pressure Gradient Measurement (PGM) System circuit model illustrating the LC sensor and readout coil and circuitry. (<b>b</b>) Two <span class="html-italic">Re</span>{<span class="html-italic">Z<sub>in</sub></span>} datasets illustrating relevant parameters.</p>
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<p>Comparison of example <span class="html-italic">Re</span>{<span class="html-italic">Z<sub>in</sub></span>} datasets at 0 and 20 bar applied pressure for three LC sensor designs (given in <a href="#sensors-23-02525-t003" class="html-table">Table 3</a>). All datasets plotted over their bandwidth (i.e., bandwidth normalized).</p>
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<p>Model geometry of LC sensor and readout coils and Magnetic field distribution at 13 MHz excitation. Assumed material properties for FEA given in <a href="#sensors-23-02525-t004" class="html-table">Table 4</a>.</p>
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<p>Verification of <span class="html-italic">FOM</span> comparing measured and predicted pressure resolution for varying LC sensor designs.</p>
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<p>Circuit schematic of readout node on Readout PCB.</p>
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<p>(<b>a</b>) Cross-section of packaged LC sensor. (<b>b</b>). Unpackaged LC sensor coil and inset image of capacitive pressure transducer. (<b>c</b>) Response of capacitive pressure transducer. (<b>d</b>). 3D printed bottom metal substrate stiffener (left) and top metal cover (right). (<b>e</b>) Fully packaged LC sensor. (<b>f</b>) Readout PCB showing two readout nodes.</p>
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<p>(<b>a</b>) FEA modelling of von Mises stress distribution in LC sensor packaging under applied pressure of 230 bar. (<b>b</b>) Experimental <span class="html-italic">Re</span>{<span class="html-italic">Z<sub>in</sub></span>} datasets for LC sensors in unpackaged and packaged configurations. Assumed material properties for FEA given in <a href="#sensors-23-02525-t004" class="html-table">Table 4</a>.</p>
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<p>(<b>a</b>) Flow test setup illustrating LC sensors (LC<sub>n</sub>) and wired pressure gauges (PG) in flow path with wirelessly coupled Readout nodes (RN<sub>n</sub>). Check valves (CV<sub>n</sub>) create pressure drop. (<b>b</b>) Measured pressure of LC sensors (LC<sub>n</sub>) and flow rate during flow experiment at 25 °C (left), and measured pressure of wired gauges (PG<sub>n</sub>) during flow experiment (right). Error bars for measurement resolution not visible at scale (95% confidence interval: &lt;1.5 mbar).</p>
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<p>This figure shows the shift in the resonant frequency, <span class="html-italic">f</span><sub>0</sub>, resulting from applied pressure (<b>left</b>) and the applied temperature (<b>right</b>). Error bars not visible at scale (95% confidence interval: ±0.041 kHz).</p>
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<p>Measured pressure resolution (<span class="html-italic">Resol<sub>Meas</sub></span>) of PGM system.</p>
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<p>(<b>a</b>) Illustration of axial misalignment (<span class="html-italic">AM</span>) and interrogation gap (<span class="html-italic">IG</span>). (<b>b</b>) Measured pressure resolution with non-ideal <span class="html-italic">AM</span> and <span class="html-italic">IG</span>.</p>
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12 pages, 4284 KiB  
Article
LC Passive Wireless Sensor System Based on Two Switches for Detection of Triple Parameters
by Muhammad Mustafa, Mian Rizwan, Muhammad Kashif, Tahir Khan, Muhammad Waseem and Andres Annuk
Sensors 2022, 22(8), 3024; https://doi.org/10.3390/s22083024 - 14 Apr 2022
Cited by 5 | Viewed by 3335
Abstract
This paper presents the LC-type passive wireless sensing system for the simultaneous and independent detection of triple parameters, featuring three different capacitive sensors controlled by two mechanical switches. The sensor coil was connected with three different capacitors in parallel and two mechanical switches [...] Read more.
This paper presents the LC-type passive wireless sensing system for the simultaneous and independent detection of triple parameters, featuring three different capacitive sensors controlled by two mechanical switches. The sensor coil was connected with three different capacitors in parallel and two mechanical switches were in series between every two capacitors, which made the whole system have three resonant frequencies. The readout coil was magnetically coupled with the sensor coil to interrogate the sensor wirelessly. The circuit was simulated advanced design system (ADS) software, and the LC sensor system was mathematically analyzed by MATLAB. Results showed that the proposed LC sensing system could test three different capacitive sensors by detecting three different resonant frequencies. The sensitivity of sensors could be determined by the capacitance calculated from the detected resonant frequencies, and the resolution of capacitance was 0.1 PF and 0.2 PF when using the proposed sensor system in practical applications. To validate the proposed scheme, a PCB inductor and three variable capacitors were constructed with two mechanical switches to realize the desired system. Experimental results closely verified the simulation outputs. Full article
(This article belongs to the Special Issue Emerging Trends in Wireless Sensor Networks)
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<p>Scheme of LC passive wireless sensor inductive link.</p>
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<p>Graphical representation of LC passive wireless sensor system.</p>
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<p>Theoretical model demonstration (<b>a</b>) LC triple parameters monitoring system integrated with two relay switches. (<b>b</b>) Representation of working principle.</p>
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<p>Layout simulations setup using ADS and results. (<b>a</b>) Simulation setup when both switches were in off-state. (<b>b</b>) Detected resonant frequencies by applying sweep parameter at <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>1</mn> </msub> </mrow> </semantics></math>.</p>
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<p>Simulation curves of resonant frequencies versus three capacitors, respectively (<b>a</b>) Resonant frequencies versus <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>1</mn> </msub> </mrow> </semantics></math> when <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>2</mn> </msub> </mrow> </semantics></math> and <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>3</mn> </msub> </mrow> </semantics></math> were fixed at 50 pF; (<b>b</b>) resonant frequencies versus <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>2</mn> </msub> </mrow> </semantics></math> when <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>1</mn> </msub> </mrow> </semantics></math> and <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>3</mn> </msub> </mrow> </semantics></math> were fixed at 50 pF; (<b>c</b>) resonant frequencies versus <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>3</mn> </msub> <mo> </mo> </mrow> </semantics></math> when <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>1</mn> </msub> </mrow> </semantics></math> and <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>2</mn> </msub> </mrow> </semantics></math> were fixed at 50 pF.</p>
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<p>Schematic diagram of experimental setup.</p>
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<p>Experiments of the LC sensor system. (<b>a</b>) Experimental platform of readout coil and monitoring sensor system. (<b>b</b>) PCB planar square copper inductor.</p>
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<p>Experimental results of detected resonant frequency versus S11 parameter of proposed LC sensor system, (<b>a</b>) combined representation of detected frequencies for maximum and minimum values of three capacitors, (<b>b</b>) curves for variation in <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>1</mn> </msub> </mrow> </semantics></math>, (<b>c</b>) curves for variation in <math display="inline"><semantics> <mrow> <msub> <mi mathvariant="normal">C</mi> <mn>2</mn> </msub> </mrow> </semantics></math>, (<b>d</b>) curves for variation in <math display="inline"><semantics> <mrow> <msub> <mrow> <mrow> <mi mathvariant="normal">C</mi> </mrow> </mrow> <mn>3</mn> </msub> </mrow> </semantics></math>.</p>
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18 pages, 6248 KiB  
Article
All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications
by Kavin Sivaneri Varadharajan Idhaiam, Joshua A. Caswell, Peter D. Pozo, Katarzyna Sabolsky, Konstantinos A. Sierros, Daryl S. Reynolds and Edward M. Sabolsky
Sensors 2022, 22(6), 2165; https://doi.org/10.3390/s22062165 - 10 Mar 2022
Cited by 7 | Viewed by 3685
Abstract
In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. [...] Read more.
In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al2O3 substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO2 doping) on the quality factor showed an increase of Qf from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments. Full article
(This article belongs to the Special Issue Sensors for High Temperature Monitoring)
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<p>Schematic representation of the (<b>a</b>) parallel capacitor architecture where the diameter of the Al<sub>2</sub>O<sub>3</sub> dielectric layer was kept 10% larger than the top and the bottom electrodes to prevent short-circuiting the capacitor, (<b>b</b>) passive wireless LC resonator consisting of parallel capacitor and planar inductor, and (<b>c</b>) topography of the multi-layered stack.</p>
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<p>Comparison of the particle size distribution of the as-purchased and the attrition-milled ITO.</p>
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<p>Schematic of proposed LC resonator consisting of (<b>a</b>) bottom capacitor electrode and planar inductor; (<b>b</b>) dielectric layer with the insulation bridge; (<b>c</b>) top electrode connecting the inner inductor to the top capacitor to complete the LC circuit; (<b>d</b>) 3D schematics of the different layers of the LC resonator; (<b>e</b>) optical microscope image of the LC resonator after co-sintering at 1250 °C for 4 h in ambient atmospheric conditions.</p>
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<p>SEM micrograph of the cross-section of the parallel capacitor showing (<b>a</b>) all three layers of the ITO–Al<sub>2</sub>O<sub>3</sub>–ITO co-sintered at 1250 °C. The area between two white dotted lines represents the Al<sub>2</sub>O<sub>3</sub> dielectric layer, whereas the area between the white and green dotted lines represents ITO top and bottom electrodes. (<b>b</b>) Magnified image of the ITO–Al<sub>2</sub>O<sub>3</sub> dielectric layer (yellow dotted box in (<b>a</b>)) showing that there is a clear boundary between the interfaces and no microscopic reaction at the ITO–Al<sub>2</sub>O<sub>3</sub> interface. (<b>c</b>) High magnification image showing the percolation of ITO and Al<sub>2</sub>O<sub>3</sub> grains (dark orange box in (<b>b</b>)).</p>
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<p>SEM micrograph of the (<b>a</b>) cross-section of the planar inductor deposited on Al<sub>2</sub>O<sub>3</sub> substrate sintered at 1250 °C showing that the thickness of the ITO layer is 50 μm; (<b>b</b>,<b>c</b>) topography of the ITO electrodes and the magnified image revealing the percolated grains of ITO with an average grain size of 2.2 ± 0.62 μm.</p>
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<p>The temperature-dependent capacitance of the parallel capacitor from 100–1200 °C in ambient atmospheric conditions.</p>
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<p>Wireless response of the LC resonator simulated by (<b>a</b>) varying only the electrical conductivity of ITO from room temperature (~90 S/cm) to 1200 °C (270 S/cm); (<b>b</b>) changing both the electrical conductivity of ITO and the dielectric permittivity of Al<sub>2</sub>O<sub>3</sub> layer. The permittivity was calculated from capacitance versus temperature using Equation (3), assuming no physical change in the dimension due to temperature.</p>
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<p>Picture of the experimental setup used to characterize the wireless response as a function of temperature. Schematic of the LC resonator characterization depicts the Pt antenna thermally shielded from the hot zone by a 1-inch (~2.54 cm)-thick Al<sub>2</sub>O<sub>3</sub> insulation. The equivalent circuit diagram is also shown, which presents the principle of mutual inductive coupling between the reader antenna and the LC resonator in the hot zone.</p>
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<p>Wireless response of the LC resonator during (<b>a</b>) the heating and (<b>b</b>) the cooling cycle with a steady rate of 1 °C/min. The shift in the resonant frequency curve is due to temperature variation.</p>
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<p>Extrapolated resonant frequency minima of the heating and cooling cycle of the LC resonator. The peak fit is a third-order nonlinear polynomial function.</p>
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<p>The temperature-dependent quality factor (<span class="html-italic">Q<sub>f</sub></span>) of the parallel capacitor from 100 °C to 1200 °C in ambient atmospheric conditions.</p>
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9 pages, 3440 KiB  
Communication
An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications
by Pinggang Jia, Jia Liu, Jiang Qian, Qianyu Ren, Guowen An and Jijun Xiong
Sensors 2021, 21(19), 6602; https://doi.org/10.3390/s21196602 - 3 Oct 2021
Cited by 3 | Viewed by 3291
Abstract
An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material [...] Read more.
An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 °C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22–900 °C and 0–700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments. Full article
(This article belongs to the Section Physical Sensors)
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<p>Schematic diagram of sensor operation. (<b>a</b>) Illustrative equivalent circuit schematic model of LC measurement. (<b>b</b>) Pressure sensing principle. (<b>c</b>) Structure of the sensor. (<b>d</b>) 3D model of the sensor.</p>
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<p>The fabrication process of the single-crystal MgO LC wireless passive pressure sensor.</p>
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<p>(<b>a</b>) The cross-selection SEM image of the cavity. (<b>b</b>–<b>d</b>) SEM images of the bonding interface and cavity at different magnifications.</p>
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<p>(<b>a</b>) Sintering curve of Pt conductor. (<b>b</b>,<b>c</b>) The top and bottom layers of the sensor. (<b>d</b>,<b>e</b>) The partially enlarged details of the inductors. (<b>f</b>,<b>g</b>) SEM images of Pt before and after high-temperature pressure testing.</p>
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<p>Temperature–pressure composite measurement platform. (<b>a</b>) Working principle of pressure measurement system. (<b>b</b>) High-temperature pressure experimental platform.</p>
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<p>Pressure test results of the proposed sensor at room temperature. (<b>a</b>) The pressure versus resonant frequency curve under 0 kPa–700 kPa. (<b>b</b>) The frequency responses to pressure during the pressure increasing and decreasing process.</p>
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<p>(<b>a</b>) The resonant frequency changes with the temperature under 0 kPa. (<b>b</b>) The zero drift of the sensor. (<b>c</b>) The pressure versus frequency from 0 kPa to 700 kPa at 900 °C. (<b>d</b>) The frequency error of the sensor at 900 °C.</p>
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<p>(<b>a</b>) The pressure versus resonant frequency curve at temperatures of 22–900 °C. (<b>b</b>) The pressure sensitivity of the sensor at different temperatures.</p>
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21 pages, 5551 KiB  
Article
Flexible Wireless Passive LC Pressure Sensor with Design Methodology and Cost-Effective Preparation
by Zhuqi Sun, Haoyu Fang, Baochun Xu, Lina Yang, Haoran Niu, Hongfei Wang, Da Chen, Yijian Liu, Zhuopeng Wang, Yanyan Wang and Qiuquan Guo
Micromachines 2021, 12(8), 976; https://doi.org/10.3390/mi12080976 - 18 Aug 2021
Cited by 11 | Viewed by 3597
Abstract
Continuous monitoring of physical motion, which can be successfully achieved via a wireless flexible wearable electronic device, is essential for people to ensure the appropriate level of exercise. Currently, most of the flexible LC pressure sensors have low sensitivity because of the high [...] Read more.
Continuous monitoring of physical motion, which can be successfully achieved via a wireless flexible wearable electronic device, is essential for people to ensure the appropriate level of exercise. Currently, most of the flexible LC pressure sensors have low sensitivity because of the high Young’s modulus of the dielectric properties (such as PDMS) and the inflexible polymer films (as the substrate of the sensors), which don’t have excellent stretchability to conform to arbitrarily curved and moving surfaces such as joints. In the LC sensing system, the metal rings, as the traditional readout device, are difficult to meet the needs of the portable readout device for the integrated and planar readout antenna. In order to improve the pressure sensitivity of the sensor, the Ecoflex microcolumn used as the dielectric of the capacitive pressure sensor was prepared by using a metal mold copying method. The Ecoflex elastomer substrates enhanced the levels of conformability, which offered improved capabilities to establish intimate contact with the curved and moving surfaces of the skin. The pressure was applied to the sensor by weights, and the resonance frequency curves of the sensor under different pressures were obtained by the readout device connected to the vector network analyzer. The experimental results show that resonant frequency decreases linearly with the increase of applied pressure in a range of 0–23,760 Pa with a high sensitivity of −2.2 MHz/KPa. We designed a coplanar waveguide-fed monopole antenna used to read the information of the LC sensor, which has the potential to be integrated with RF signal processing circuits as a portable readout device and a higher vertical readout distance (up to 4 cm) than the copper ring. The flexible LC pressure sensor can be attached to the skin conformally and is sensitive to limb bending and facial muscle movements. Therefore, it has the potential to be integrated as a body sensor network that can be used to monitor physical motion. Full article
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<p>(<b>a</b>) Illustration of the flexible LC pressure sensor for the measurement of physical movement signals. (<b>b</b>) Exploded view schematic diagram of the flexible LC pressure sensor. (<b>c</b>) Schematic diagram of the coil antenna, and (<b>d</b>) micro-column dielectric with marked size parameters.</p>
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<p>(<b>a</b>) The finite element simulation model of the readout system of the flexible LC pressure sensor. (<b>b</b>) Simulation model, (<b>c</b>) resonance frequency curves, and (<b>d</b>) the pressure sensitivity curve of the flexible LC pressure sensor based on PDMS micro-column dielectric and PI substrate. (<b>e</b>) Simulation model, (<b>f</b>) resonance frequency curves, and (<b>g</b>) the pressure sensitivity curve of the flexible LC pressure sensor with Ecoflex micro-column dielectric sandwiched between Ecoflex substrates. (<b>h</b>) Simulated stress distribution when the pressure being applied on the upper capacitor plate of the LC sensor based on Ecoflex material is 2000 Pa.</p>
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<p>Flow charts of the fabrication of the micro-column dielectric. (<b>a</b>), the LC coil antenna (<b>b</b>), and the flexible LC pressure sensor (<b>c</b>). The physical picture of the sensor with Ecoflex micro-column and substrate (<b>d</b>), Ecoflex micro-column and PI substrate (<b>e</b>), and PDMS micro-column and substrate (<b>f</b>).</p>
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<p>(<b>a</b>) Schematic diagram of the readout system of the flexible LC pressure sensor. (<b>b</b>) Equivalent circuit diagram of the readout system. Frequency response curves of the flexible LC pressure sensor were measured as the readout copper ring was placed in different vertical distances (<b>c</b>), horizontal displacements (<b>d</b>), and rotation angles (<b>e</b>).</p>
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<p>(<b>a</b>) Physical images of sensitivity test using various flexible LC pressure sensors. Frequency response curves of the sensor based on Ecoflex micro-column and substrate (<b>b</b>), Ecoflex micro-column and PI substrate (<b>c</b>), and PDMS micro-column and substrate (<b>d</b>), which were applied different pressures. (<b>e</b>) The comparison of the pressure sensitivity of various flexible LC pressure sensors.</p>
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<p>(<b>a</b>) Schematic diagram of the readout system of the flexible LC pressure sensing array. (<b>b</b>) Frequency response curves of the array with three LC pressure sensors under different pressures applied to the sensing unit 1. Frequency response curves of the array with two LC pressure sensing units under different pressures applied to the sensing unit 1 (<b>c</b>) and the sensing unit 2 (<b>d</b>).</p>
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<p>(<b>a</b>) Physical drawing of the monopole antenna. (<b>b</b>) The intrinsic resonance frequency of the monopole antenna was obtained by the HFSS simulation experiment. When the monopole antenna was located at different vertical distances (<b>c</b>), horizontal displacements (<b>d</b>), and oriented at different angles (<b>e</b>), the resonance frequencies of the sensor were measured. (<b>f</b>) The frequency response of the sensor under applied increasing pressure was read out by the monopole antenna. (<b>g</b>) Comparison of the sensitivities of different pressure sensors measured by two readout devices. (<b>h</b>) Frequency response of the pressure sensing array with sensing unit 2 under applied pressure was measured by the monopole antenna.</p>
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<p>Resonant frequency curves of sensors corresponding to different finger bending states were measured by the readout copper ring (<b>a</b>) and the planar monopole antenna (<b>b</b>). (<b>c</b>) The relationship curves between the resonant frequency of the sensor and different finger bending angles. Resonance frequency curves corresponding to the facial smile (<b>d</b>,<b>e</b>), frown (<b>f</b>,<b>g</b>), wrist bending (<b>h</b>), and balloon inflation (<b>i</b>).</p>
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10 pages, 1727 KiB  
Article
Wireless Passive LC Temperature and Strain Dual-Parameter Sensor
by Ya Wang, Qiulin Tan, Lei Zhang, Baimao Lin, Meipu Li and Zhihong Fan
Micromachines 2021, 12(1), 34; https://doi.org/10.3390/mi12010034 - 30 Dec 2020
Cited by 13 | Viewed by 3057
Abstract
There is an increasing demand for bearing temperature and strain monitoring in high-speed rotating systems. This study proposes a new multiresonance, multiplexing, wireless, passive inductance capacitance (LC) temperature and strain sensor. The sensor has two capacitors connected at different locations (turns) on the [...] Read more.
There is an increasing demand for bearing temperature and strain monitoring in high-speed rotating systems. This study proposes a new multiresonance, multiplexing, wireless, passive inductance capacitance (LC) temperature and strain sensor. The sensor has two capacitors connected at different locations (turns) on the same inductor to achieve simultaneous temperature and strain measurements. The plate capacitor is connected to the inner part of the inductor and the other interdigital capacitor is connected to the outer part of the inductor to form two LC loops. The structure of the sensor is optimized through High Frequency Structure Simulator (HFSS) simulations to realize frequency separation of the two parameters and avoid mutual interference between the two signals. The sensor is fabricated on a polyimide film using electroplating technology. The experimental results show that the temperature–strain sensor can operate stably from 25 °C to 85 °C with an average sensitivity of 27.3 kHz/°C within this temperature range. The sensor can detect strains in the range of 1000–5000 με with a strain sensitivity of 100 Hz/με at 25 °C. Therefore, the proposed wireless passive LC temperature-strain sensor exhibits stable performance. In addition, the use of a single inductor effectively reduces the sensor’s area. The flexible substrate provides advantageous surface conformal attachment characteristics suitable for monitoring high-temperature rotating parts in adverse environments. Full article
(This article belongs to the Section E:Engineering and Technology)
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<p>Design and simulation of integrated dual-parameter sensor: (<b>a</b>) Sensor’s equivalent circuit diagram; (<b>b</b>) Sensor’s <span class="html-italic">f</span>–S<sub>11</sub> simulation curve, and (<b>c</b>) Sensor’s simulated electric field distribution.</p>
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<p>Preparation of integrated dual-parameter sensor: (<b>a</b>) Oxygen plasma treatment on the surface of the polyimide (PI) film; (<b>b</b>) Laser drilling; (<b>c</b>) Through-hole metallization; (<b>d</b>) Plating of copper on the posterior part of the PI film; (<b>e</b>) Copper deposition on the front part of the PI film.</p>
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<p>Strain measurement device and results: (<b>a</b>) Strain measurement device; (<b>b</b>) Experiment data under different pressure; (<b>c</b>) Change in strain as a function of pressure, and (<b>d</b>) Interdigital capacitance change as a function of strain.</p>
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<p>Strain results of the dual-parameter wireless sensor: (<b>a</b>) Diagram used to explain the strain mechanism; (<b>b</b>) 0–5000 με strain response curve of the dual-parameter sensor; (<b>c</b>) Enlarged view of the strain response curve of the strain-sensitive unit; (<b>d</b>) Enlarged view of the strain response curve of the temperature-sensitive unit; (<b>e</b>) Fitted curve of the strain response of the strain-sensitive unit, and (<b>f</b>) Fitted curve of the strain response of the temperature-sensitive unit.</p>
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<p>Temperature results of the dual-parameter wireless sensor: (<b>a</b>) Plate capacitance change as a function of temperature; (<b>b</b>) Temperature response curve (25–85 °C) of the dual-parameter sensor, and an (<b>c</b>) enlarged view of the temperature response curve of the temperature-sensitive unit. (<b>d</b>) Enlarged view of the temperature response curve of the strain-sensitive unit; (<b>e</b>) fitted curve of the temperature response curve of the temperature-sensitive unit, and (<b>f</b>) Fitted curve of the temperature response of the strain-sensitive unit.</p>
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13 pages, 3420 KiB  
Article
Implementation of Simultaneous Multi-Parameter Monitoring Based in LC-Type Passive Wireless Sensing with Partial Overlapping and Decoupling Coils
by Juan Ignacio Sancho, Noemí Perez, Joaquin De Nó and Jaizki Mendizabal
Sensors 2019, 19(23), 5183; https://doi.org/10.3390/s19235183 - 26 Nov 2019
Cited by 6 | Viewed by 3274
Abstract
Inductor–capacitor (LC) passive wireless sensors are widely used for remote sensing. These devices are limited in applications where multiparameter sensing is required, because of the mutual coupling between neighboring sensors. This article presents two effective decoupling techniques for multiparameter sensing, based on partially [...] Read more.
Inductor–capacitor (LC) passive wireless sensors are widely used for remote sensing. These devices are limited in applications where multiparameter sensing is required, because of the mutual coupling between neighboring sensors. This article presents two effective decoupling techniques for multiparameter sensing, based on partially overlapped sensors and decoupling coils, which, when combined, reduce the mutual coupling between sensors to near zero. A multiparameter LC sensor prototype with these two decoupling mechanisms has been designed, simulated, and measured. This prototype is capable of simultaneously measuring four parameters. The measurements demonstrate that the changes in capacitance in one individual sensor do not affect the measurements of the other sensors. This principle has been applied to simultaneous wear sensing using four identical wear sensors. Full article
(This article belongs to the Section Sensor Networks)
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<p>Proposed structure for (<b>a</b>) reader coil and (<b>b</b>) four partially overlapped rectangular inductor–capacitor (LC) sensors. The reader coil and sensors are printed in a Printed Circuit Board (PCB). Dotted lines correspond to the bottom layer.</p>
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<p>Equivalent circuit and magnitudes for two magnetically coupled LC sensors with a readout coil antenna.</p>
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<p>Using (<b>a</b>) partially overlapped coils and (<b>b</b>) a decoupling coil to achieve zero coupling between two LC sensors.</p>
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<p>Simulated (CST Studio Suite) coupling coefficient (k) between two overlapped LC sensors as a function of its overlapping x. The x (mm) magnitude is described in <a href="#sensors-19-05183-f003" class="html-fig">Figure 3</a>.</p>
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<p>Structure of a four partially overlapped rectangular LC sensors for measuring the s<sub>21</sub> transmission scattering parameter between them: (<b>a</b>) without decoupling coils and (<b>b</b>) with decoupling coils.</p>
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<p>A comparison of the obtained s<sub>21</sub> transmission scattering parameter between two generic sensors (1 and 2) using partial overlapping and decoupling coils.</p>
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<p>Measured resonant frequencies in the four-parameter LC sensor. The coils are separately connected to four discrete sets of SMD ceramic capacitors (C<sub>1</sub>, C<sub>2</sub>, C<sub>3</sub>, and C<sub>4</sub>). Capacitors C<sub>1</sub>, C<sub>2</sub>, and C<sub>4</sub> remain unchanged; and consequently, the resonant frequencies (f<sub>1</sub>, f<sub>2</sub>, and f<sub>4</sub>), respectively, remain unchanged. Capacitor C<sub>3</sub> is changed to values of (<b>a</b>) C<sub>3</sub> = 150 pF, (<b>b</b>) C<sub>3</sub> = 172 pF, and (<b>c</b>) C<sub>3</sub> = 190 pF, changing the resonant frequency (f<sub>3</sub>).</p>
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<p>Structure of the capacitive wear sensor: (<b>a</b>) before wear occurs and (<b>b</b>) when wear occurs.</p>
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<p>Measurement setup. The four capacitive wear sensors are fixed on the blade and connected with cables to four partially overlapped coils with decoupling coils.</p>
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<p>Measured resonant frequencies with four capacitive wear sensors (S<sub>1</sub>, S<sub>2</sub>, S<sub>3</sub>, and S<sub>4</sub>) for different wears. The actual wear values for each sensor are defined in the legend. The resonant measured frequencies are associated with a wear (shown at the top of the figure).</p>
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10 pages, 3251 KiB  
Article
Passive Wireless LC Proximity Sensor Based on LTCC Technology
by Mingsheng Ma, Yi Wang, Feng Liu, Faqiang Zhang, Zhifu Liu and Yongxiang Li
Sensors 2019, 19(5), 1110; https://doi.org/10.3390/s19051110 - 5 Mar 2019
Cited by 21 | Viewed by 7531
Abstract
In this work, we report a passive wireless eddy current proximity sensor based on inductive-capacitive (LC) resonance using a low temperature co-fired ceramic (LTCC) technology. The operation principle of the LC proximity sensor to the metal targets was comprehensively discussed through electromagnetic simulation [...] Read more.
In this work, we report a passive wireless eddy current proximity sensor based on inductive-capacitive (LC) resonance using a low temperature co-fired ceramic (LTCC) technology. The operation principle of the LC proximity sensor to the metal targets was comprehensively discussed through electromagnetic simulation and circuit model. Copper and aluminum were selected as the metal target materials for the measurements. Circular copper plates with different diameters and thickness were used to investigate the influence of the surface area and thickness of the target on the sensitivity. The decreases of the sensitivity with the decrease of the surface area and thickness were observed. The LC proximity sensor showed a high sensitivity of 11.2 MHz/mm for the proximity distance of 1–3 mm, and large detection range up to 10 mm. The developed LC proximity sensor is promising for passive wireless metal detections and proximity measurements under harsh environments. Full article
(This article belongs to the Special Issue Passive Electromagnetic Sensors for Autonomous Wireless Networks)
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<p>Schematic diagram of the inductive-capacitive (LC) proximity sensor based on low temperature co-fired ceramic (LTCC).</p>
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<p>(<b>a</b>) Schematic diagram of the LC proximity sensor for metal target. (<b>b</b>) Electromagnetic simulation on the distribution of the eddy current and magnetic field. (<b>c</b>) Equivalent circuit of the proximity sensing system.</p>
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<p>Measurement setup for the LC proximity sensor.</p>
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<p>Response of the LC proximity sensor for the target of (<b>a</b>) A80 and (<b>b</b>) C80 at different testing distances.</p>
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<p>Frequency shift of the LC proximity sensor as a function of distance from the target for A80 and C80.</p>
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<p>Frequency shift of the LC proximity sensor in dependence of the distance from the three targets of C15, C45, and C80.</p>
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<p>Simulated eddy current distribution for the target of (<b>a</b>) C15, (<b>b</b>) C45, and (<b>c</b>) C80.</p>
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<p>Frequency shift of the LC proximity sensor in dependence of distance from the targets of C1, C4, and C8.</p>
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12 pages, 4239 KiB  
Article
A MoS2 Nanoflakes-Based LC Wireless Passive Humidity Sensor
by Shujing Su, Wen Lv, Tong Zhang, Qiulin Tan, Wendong Zhang and Jijun Xiong
Sensors 2018, 18(12), 4466; https://doi.org/10.3390/s18124466 - 17 Dec 2018
Cited by 14 | Viewed by 5189
Abstract
In this study, an LC wireless passive humidity sensor based on MoS2 nanoflakes was proposed. The LC wireless passive humidity sensor was optimized by performing HFSS simulations and fabricated via a screen-printing technique. The MoS2 nanoflakes were characterized by laser scanning [...] Read more.
In this study, an LC wireless passive humidity sensor based on MoS2 nanoflakes was proposed. The LC wireless passive humidity sensor was optimized by performing HFSS simulations and fabricated via a screen-printing technique. The MoS2 nanoflakes were characterized by laser scanning confocal microcopy, scanning electron microscope, and X-ray diffraction. The measurements show the sensor can operate stably for a long time with a hysteresis of 4% RH (relative humidity) in 10–95% RH. At low humidity environment (10–60% RH), the sensitivity of the as-prepared humidity sensor is 2.79 kHz/% RH, and a sensitivity of 76.04 kHz/% RH was realized in a high humidity environment (60–95% RH). In this regard, the sensing mechanism was discussed in the scope of proton transfer theory. The test results also indicate that the response time and recovery time of the prepared sensor are 10 s, 15 s, respectively and between 15~40 °C the sensitivity of sensor was not temperature-dependent in the range of 10~80% RH. In addition, the sensor shows less sensitivity to temperature in the 15–25 °C range at 90% RH. All of these experimental results show that the prepared LC wireless passive humidity sensor can stably monitor the rapidly changing humidity in a sealed and narrow environment for a long time. Full article
(This article belongs to the Special Issue Resonant Sensors)
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<p>(<b>a</b>) Illustrative model schematic of LC wireless measurement; (<b>b</b>) as-designed humidity sensor; (<b>c</b>) the HFSS simulation model of as-designed humidity sensor; (<b>d</b>) the distance-S<sub>11</sub> curve of humidity sensor; (<b>e</b>) electric field distribution of sensor at 10 mm; (<b>f</b>) S<sub>11</sub> versus frequency curve of as-designed humidity sensor based on HFSS simulation at 10 mm.</p>
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<p>(<b>a</b>) The fabrication process and (<b>b</b>) the firing curve of the as-prepared LC humidity sensor.</p>
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<p>The frequencies of sensors at 10% RH and 95% RH.</p>
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<p>The frequency shift of sensors between 10% RH–95% RH.</p>
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<p>(<b>a</b>) The optical image of as-prepared LC humidity sensor; (<b>b</b>) the morphology result of as-sprayed MoS<sub>2</sub> film; (<b>c</b>) the microscopy of MoS<sub>2</sub> nanoflakes; and (<b>d</b>) X-ray diffraction patterns of MoS<sub>2</sub> nanoflakes.</p>
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<p>(<b>a</b>) the schematic diagram of measurement; (<b>b</b>) S<sub>11</sub> versus Frequency curve comparison of Experimental measurement and HFSS simulation at 10% RH; (<b>c</b>) S<sub>11</sub>-f curve of as-prepared humidity sensor in 10–95% RH; (<b>d</b>) f-Humidity curve of as-prepared humidity sensor under low humidity conditions (10–60% RH); (<b>e</b>) f-Humidity curve of as-prepared humidity sensor under high humidity conditions (60–95% RH).</p>
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<p>Sensing mechanism (<b>a</b>) under low humidity conditions (10–60% RH) and (<b>b</b>) under high humidity conditions (60–95% RH).</p>
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<p>(<b>a</b>) The response and recovery, (<b>b</b>) long-term stability and (<b>c</b>) hysteresis results of as-prepared humidity sensor; (<b>d</b>) frequency-temperature curve at different humidity.</p>
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11 pages, 2414 KiB  
Article
A Room-Temperature CNT/Fe3O4 Based Passive Wireless Gas Sensor
by Tao Guo, Tianhao Zhou, Qiulin Tan, Qianqian Guo, Fengxiang Lu and Jijun Xiong
Sensors 2018, 18(10), 3542; https://doi.org/10.3390/s18103542 - 19 Oct 2018
Cited by 17 | Viewed by 4828
Abstract
A carbon nanotube/Fe3O4 thin film-based wireless passive gas sensor with better performance is proposed. The sensitive test mechanism of LC (Inductance and capacitance resonant) wireless sensors is analyzed and the reason for choosing Fe3O4 as a gas [...] Read more.
A carbon nanotube/Fe3O4 thin film-based wireless passive gas sensor with better performance is proposed. The sensitive test mechanism of LC (Inductance and capacitance resonant) wireless sensors is analyzed and the reason for choosing Fe3O4 as a gas sensing material is explained. The design and fabrication process of the sensor and the testing method are introduced. Experimental results reveal that the proposed carbon nanotube (CNT)/Fe3O4 based sensor performs well on sensing ammonia (NH3) at room temperature. The sensor exhibits not only an excellent response, good selectivity, and fast response and recovery times at room temperature, but is also characterized by good repeatability and low cost. The results for the wireless gas sensor’s performance for different NH3 gas concentrations are presented. The developed device is promising for the establishment of wireless gas sensors in harsh environments. Full article
(This article belongs to the Special Issue Advanced Nanomaterials based Gas Sensors)
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<p>Sensor coupling model.</p>
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<p>(<b>a</b>) Sensor model. (<b>b</b>) Sensor circuit model. (<b>c</b>) Ammonia molecule model. (<b>d</b>) Diagram of adsorbed gas molecules. (<b>e</b>) Trend of resonant frequency.</p>
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<p>Model of the intermolecular binding force.</p>
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<p>(<b>a</b>) Design of the LC (Inductance and capacitance resonant) wireless sensor. (<b>b</b>) Simulation results for the designed sensor. (<b>c</b>) Schematic of the fabrication procedure of the gas sensor.</p>
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<p>Schematic of the wireless gas sensing measurement setup.</p>
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<p>(<b>a</b>) Diagram of the change in the resonant frequency of the gas sensor at 40 ppm atmospheric ammonia at room temperature. (<b>b</b>) Amplified view into the trend of change plot in panel (<b>a</b>).</p>
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<p>(<b>a</b>) Variation in the resonant frequency of the sensor for different concentrations of atmospheric ammonia. (<b>b</b>) Linearity curve of the sensor.</p>
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<p>(<b>a</b>) Repeatability of the gas sensor exposed to 20, 40, and 60 ppm of atmospheric ammonia, at room temperature. (<b>b</b>) Long-term stability of the gas sensor exposed to 20, 40, and 60 ppm of acetone gas.</p>
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<p>(<b>a</b>) Responses of different gas sensitive films to ammonia. (<b>b</b>) Response of the proposed sensor to different gases.</p>
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