New Fabrication of Multiple-Layer Microcoil Using Anodic Oxidized Aluminum

Kenichi Muraki and Katsutoshi Kuribayashi

Yamaguchi University, 2-16-1 Tokiwadai, Ube, Yamaguchi 755-8611, Japan

Received:

April 4, 1999

Accepted:

June 4, 1999

Published:

October 20, 1999

Keywords:

anodic oxidation, photolithography, multiple layer, Al, Al2O3, micro coil

Abstract

A multiple-layer microcoil is a promising candidate for micromagnetic sensors for probing cracks in pipes in power stations and plants. We proposed fabrication of multiple-layer microcoils combining Al anodic oxidation and photolithography, and conducted experiments with the following results: 1) Sputter-deposited Al was anodically oxidized and thickness of Al2O3 formed controlled by anodic-oxidation time. 2) A pattern with Al and Al2O3 was made by masking Al with photoresist to prevent anodic oxidation. 3) A multiple-layer Al and Al2O3 was fabricated by combining Al anodic oxidation and photolithography. 4) As these results shown, multiple-layer microcoils having both high inductance and low resistance were fabricated as proposed using a simple process and having a high potential application to smaller multiple-layer microcoils.

Cite this article as:

K. Muraki and K. Kuribayashi, “New Fabrication of Multiple-Layer Microcoil Using Anodic Oxidized Aluminum,” J. Robot. Mechatron., Vol.11 No.5, pp. 431-435, 1999.

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