Surface Shape Measurement for Small Lens Using Phase Shift Shearing Interferometer

Ryohei Hanayama and Katsuhiro Ishii

The Graduate School for the Creation of New Photonics Industries, 1955-1 Kurematsu, Nishi-ku, Hamamatsu, Shizuoka 431-1202, Japan

Received:

December 1, 2010

Accepted:

December 22, 2010

Published:

March 5, 2011

Keywords:

shearing interferometer, phase shift interferometry, micro lens

Abstract

In discussing small-lens surface shape measurement, a shearing interferometer with a plane-parallel glass plate is used to shape a laterally sheared beam from an induced test beam, producing interferogramreflecting wavefront phase distribution. This approach is robust against disturbance thanks to common-path interferometry and to the single solid glass plate. The Degree Of Freedom (DOF) for the shape of targets is high because no reference surfaces are needed. These make our proposal practical for use in the actual factory environment. The phase shift we use to analyze the interference fringe is induced by tilting a shear plate in this configuration, which is far cheaper than conventional equipment using PZT actuators. Our interferometer’s phase distribution shows a differential image of the target wavefront, so detected phase distribution must be integrated to get the original surface shape, as confirmed in the sections that follow.

Cite this article as:

R. Hanayama and K. Ishii, “Surface Shape Measurement for Small Lens Using Phase Shift Shearing Interferometer,” Int. J. Automation Technol., Vol.5 No.2, pp. 162-166, 2011.

Data files:

References

[1] D. Malacara, “Optical Shop Testing,” John Wiley & Sons, New York, pp. 123-172, 1992.
[2] M. Born and E.Wolf, “Principles of Optics,” Cambridge University Press, Cambridge, pp. 348-352, 1999.
[3] H. Schreiber and J. Schwider, “Lateral shearing interferometer based on two Ronchi phase gratings in series,” Appl. Opt., Vol.36, pp. 5321-5324, 1997.
[4] G. Paez, M. Strojnik, and G. G. Torales, “Vectorial shearing interferometer,” Appl. Opt., Vol.39, pp. 5172-5178, 2000.
[5] F. M. Dickey and T. M. Harder, “Shearing plate optical alignment,” Opt. Eng., Vol.17, pp. 295-298, 1978.
[6] T. Nomura, K. Kamiya, S. Okuda, H. Miyashiro, K. Yoshikawa, and H. Tashiro, “Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running,” Precis. Eng., Vol.22, pp. 185-189, 1998.
[7] M. Servin, D. Malacara, and J. L.Marroquin, “Wave-front recovery from two orthogonal sheared interferograms,” Appl. Opt., Vol.35, pp. 4343-4348, 1996.
[8] C. Elster and I. Weingartner, “Solution to the shearing problem,” Appl. Opt., Vol.38, pp. 5024-5031, 1999.
[9] T. Yatagai and T. Kanou, “Aspherical surface testing with shearing interferometer using fringe scanning detection method,” Opt. Eng., Vol.23, pp. 357-360, 1984.
[10] T. Nomura, S. Okuda, K. Kamiya, H. Tashiro, and K. Yoshikawa, “Improved Saunders Method for the Analysis of Lateral Shearing Interferograms,” Appl. Opt., Vol.41, pp. 1954-1961, 2002.
[11] K. Matsuda, J. W. O’Byrne, C. J. R. Sheppard, S. Rehman, and T. Eiju, “Beam collimation in the presence of aberrations,” Opt. Commun., Vol.194, pp. 1-9, 2001.
[12] M. V. R. K. Murty, “The use of a single plane parallel plates a lateral shearing interferometer with a visible gas laser source,” Appl. Opt., Vol.3, pp. 531-534, 1964.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.