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Surface Encoders for a Mosaic Scale Grating
Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu,
and Wei Gao
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai 980-8579, Japan
Received:November 30, 2010Accepted:December 22, 2010Published:March 5, 2011
Keywords:surface encoder, mosaic grating, multiprobe, sensor
Abstract
The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in plane - in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations’ effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.
Cite this article as:K. Hosono, W. Kim, A. Kimura, Y. Shimizu, and W. Gao, “Surface Encoders for a Mosaic Scale Grating,” Int. J. Automation Technol., Vol.5 No.2, pp. 91-96, 2011.Data files:
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