Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding

Opt Express. 2011 Nov 21;19(24):24090-101. doi: 10.1364/OE.19.024090.

Authors

Jared F Bauters¹, Martijn J R Heck, Demis D John, Jonathon S Barton, Christiaan M Bruinink, Arne Leinse, René G Heideman, Daniel J Blumenthal, John E Bowers

Affiliation

¹ Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA. jbauters@ece.ucsb.edu

PMID: 22109434
DOI: 10.1364/OE.19.024090

Abstract

We demonstrate a wafer-bonded silica-on-silicon planar waveguide platform with record low total propagation loss of (0.045 ± 0.04) dB/m near the free space wavelength of 1580 nm. Using coherent optical frequency domain reflectometry, we characterize the group index, fiber-to-chip coupling loss, critical bend radius, and propagation loss of these waveguides.

Publication types

Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

Equipment Design
Equipment Failure Analysis
Light
Refractometry / instrumentation*
Scattering, Radiation
Silicon Dioxide / chemistry*
Surface Plasmon Resonance / instrumentation*

Substances

Silicon Dioxide