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Exploration of VLSI CAD researches for early design rule evaluation

Published: 25 January 2011 Publication History

Abstract

Design rule has been a primary metric to link design and technology, and is likely to be considered as IC manufacturer's role for the generation due to the empirical and unsystematic in nature. Disruptive and radical changes in terms of layout style, lithography and device in the next decade require the design rule evaluation in early development stage. In this paper, we explore VLSI CAD researches for early and systematic evaluation of design rule, which will be a key technique for enhancing the competitiveness in IC market.

References

[1]
A. B. Kahng, C.-H. Park, X. Xu and H. Yao, "Layout Decomposition Approaches for Double Patterning Lithography", IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 29(6) (2010), pp. 939--952.
[2]
K. Lucas et al., "Patterning control budgets for the 32-nm generation incorporating lithography, design, and RET variations," Proc. SPIE Conf. on Optical Microlithography, March, 2007, pp. 65200N.
[3]
M. C. Smayling, R. J. Socha, and M. V. Dusa, "22nm logic lithography in the presence of local interconnect," Proc. SPIE Conf. on Optical Microlithography, March, 2010, pp. 764019.
[4]
D. Z. Pan, J.-S. Yang, K. Yuan, and M. Cho, "CAD for Double Patterning Lithography", International Conference on IC Design and Technology (ICICDT), June, 2010, pp.
[5]
P. Gupta, K. Jeong, A. B. Kahng and C.-H. Park, "Electrical Assessment of Lithographic Gate Line-End Patterning," Microlithography, Microfabrication and Microsystems 9(2) (2010), pp. 023014.
[6]
R. S. Ghaida and P. Gupta, "A Framework for Early and Systematic Evaluation of Design Rule," Proc. ACM/IEEE Intl. Conf. on Computer-Aided 2009, pp. 615--622.
  1. Exploration of VLSI CAD researches for early design rule evaluation

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    cover image ACM Conferences
    ASPDAC '11: Proceedings of the 16th Asia and South Pacific Design Automation Conference
    January 2011
    841 pages
    ISBN:9781424475162

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    Published: 25 January 2011

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