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Optimization of High-Energy Implanter Beamline Pumping / La Fontaine, Marvin ; Pharand, Michel ; Huang, Yongzhang ; Pokidov, Ilya ; Ferrara, Joseph
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 453-456 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.453-456
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