| Article | |
| Title | A Study of Carbon Effects in Implantation Process for Non-Silicide Contact Formation |
| Author(s) | Huh, T H ; Kim, S ; Ra, G J ; Reece, R N ; Kondratenko, S I ; Kim, Y S ; Shin, K I ; Jeon, W H |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.101-104 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.101-104 |
Registro creado el 2007-03-14, última modificación el 2016-06-30
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Published version from AIP